過去十幾年間，微鑷夾相關文獻主要著重於致動方式、特殊材料應用以及不同結構設計的研究，希望將各種微致動器應用到微尺度的操控。因此，文獻大多以描述致動器的方式，來闡述微鑷夾的特性，如最大出力以及最大位移。然而在微鑷夾夾取物體的過程中的夾持力與位移關係卻鮮少被探討，但是這關係卻是展現一個微鑷夾特性的重要指標。
因此，本研究針對微機電領域所常應用的兩種致動方式，靜電式與電熱式致動，設計出梳狀致動微鑷夾、冷/熱臂熱致動微鑷夾以及曲面電極致動微鑷夾，並且透過微機電製程技術，在SOI晶片上製作出此三種微鑷夾。透過實驗設計的方式，量測三種微鑷夾的出力、位移以及驅動電壓三者關係，進一步以量化的方式探討其夾持力與位移的關係，以更加了解三種微鑷夾的特性。
除了特性研究，本研究也針對微鑷夾實際應用上所遭遇的問題，提出兩個簡易、有效的改善方式。首先針對微小尺度所常遭遇到的黏滯問題，本文透過高頻驅動夾臂，使黏附在夾臂表面的微粒有足夠的慣性力脫離夾臂表面，達成釋放的目的。透過此法，本文成功地克服微米尺度下的黏滯問題。此外，本文透過高分子絕緣法，使所有的導電元件都能與水隔絕，解決高電壓於水中應用時所遭遇到的水解問題。並以曲面電極微鑷夾驗證上述兩種改善方法之可行性，將微鑷夾之可操作範圍延伸到更小尺度以及水溶液中。

In the past tens years, most researches about micro-grippers focused on the mechanism of actuation, special material application, and sophisticated structure design, trying to apply micro-actuators to micro-manipulation. As a result, most researchers described the characteristic of micro-grippers in the way of micro-actuators, by maximum force or displacement. Although he relationship of force and displacement between maximum force and displacement is very important, few researchers placed emphasis on it..
As a result, electrostatic and electro-thermal micro-grippers have been further studies in this research through the realization and measurement of comb-drive micro-grippers, cold-hot beam micro-grippers, and curved-electrode micro-grippers on SOI wafer.
In addition to characteristics, two methods to dissolve the problems of applications have been proposed. First one is the high frequency vibration of micro-grippers, by which the stick problem of micro beads has been dissolved above the scale of micro-meter. The other is polymer isolation. By enveloping conductive parts with Parylene C, hydrolysis problem has been solved completely. Through the improved methods, micro-grippers can be applied in smaller scale and under solution.

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