本研究探討了熱蒸鍍法與近距離昇華法在製備高效率鈣鈦礦太陽能電池中的
應用及優化。
第一章概述鈣鈦礦太陽能電池的發展與研究結果，包括其結構、研究發展與
背景、重要性及面臨的挑戰，並介紹該元件的量測指標。
第二章詳述研究方法的細節，包括元件的製備及量測。
第三章為針對順序型熱蒸鍍中常見的碘化鉛(PbI2)殘留問題，本研究嘗試兩種
方法：「動態旋轉塗佈 FAI」及「引入碘化銫(CsI)或溴化銫(CsBr)作為介面層」。
前者的結果因操作難以精確控制而表現不佳，後者的結果則展現當該介面層厚度
達到 20 奈米時能有效抑制碘化鉛(PbI2)的殘留，顯著改善薄膜的品質。
第四章主要探討近距離昇華法並以該技術製備鈣鈦礦太陽能電池，本研究設
計且開發自製的真空盒，並克服初期薄膜不均勻與鈣鈦礦轉化不完全的問題。經
過多次改良後的低真空 CSS 製程使 FAPbI3鈣鈦礦太陽能電池不僅展現優異的電
性表現還具有高度一致性，其能量轉換效率從傳統順序型熱蒸鍍的 13.85%提升至
17.15%。為進一步提升製程的穩定性，本研究亦探索在高真空環境下進行 CSS，
預期將帶來更寬廣的製程窗口與更好的薄膜均勻性。
最後，第五章總結本論文的研究成果，並提出幾個未來能繼續探索及研究的
方向，希望此論文能為鈣鈦礦太陽能電池在製程方面提供新的方法與思路。

This study investigates the application and optimization of thermal evaporation and close-spaced sublimation (CSS) methods for fabricating high-efficiency perovskite solar cells (PSCs).
Chapter 1 provides an overview of the development and research outcomes of perovskite solar cells, including their structure, research progress and background, significance, and faced challenges, along with an introduction to the measurement metrics for these devices.
Chapter 2 details the research methodologies, encompassing device fabrication and characterization.
Chapter 3 addresses the common issue of lead iodide (PbI2) residue in sequential thermal evaporation. This study explored two methods: "dynamic spin coating of FAI" and "introducing cesium iodide (CsI) or cesium bromide (CsBr) as an interfacial layer." The former yielded poor results due to challenges in precise operational control, while the latter demonstrated that when the interfacial layer reached a thickness of 20 nanometers, it effectively suppressed PbI2 residue, significantly improving film quality.
Chapter 4 primarily explores the close-spaced sublimation method and its
application in fabricating PSCs. This study designed and developed a custom-built vacuum chamber, overcoming initial challenges of film non-uniformity and incomplete perovskite conversion. The improved low-vacuum CSS process enabled FAPbI3 perovskite solar cells to exhibit not only excellent electrical performance but also high consistency. Their power conversion efficiency increased from 13.85% for conventional sequential thermal evaporation to 17.15%. To further enhance process stability, this study also investigated conducting CSS in a high-vacuum environment, expecting to achieve a wider process window and better film uniformity.
Finally, chapter 5 summarizes the research findings of this thesis and proposes
several directions for future exploration and research. It is hoped that this thesis will offer new methods and insights into the fabrication processes of perovskite solar cells.