本研究期望設計一個應用於投影系統的電磁式驅動微機電掃描鏡，相較於其
他應用，此研究希望製作出擁有較大轉動角度的掃描鏡，為了感測結構轉動時的角度，所以利用多晶矽及N-well製作壓阻轉角感測器，透過掃描鏡轉動帶動壓阻產生形變，使壓阻阻值變化，進而產生電壓訊號以進行轉角感測。
本研究使用TSMC 2P4M 0.35 μm製程，將電磁式驅動掃描鏡結構及轉角感測電路整合於單一晶片上，晶片面積6.4mm × 5.8 mm，經量測後得到快軸反相位擺動模態的共振頻率為31392 Hz、慢軸扭轉模態的共振頻率為1788 Hz，在慢軸扭轉模態下，驅動電流為2.568 mApp時，慢軸光學轉角約為18.56°、在快軸反相位擺動模態下，驅動電流為31.81 mApp時，快軸光學轉角可達19.66°，規格符合SVGA的標準。感測電路部分則完成以壓阻感測器感測結構轉動角度並驗證以45°N-well作為壓阻材料的感測器其感測度最高。為了解此結構受到空氣阻力影響的程度，將掃描鏡置於壓力腔並將氣壓下降至0.03大氣壓的環境後，慢軸扭轉與快軸反相位擺動的品質參數變為798和4056。最後本研究分別使用lock-in Amplifier和電路實現閉迴路控制系統。在快軸反相位擺動模態中，使用PI控制能大幅降低頻率與振幅的艾倫方差，在慢軸扭轉模態閉迴路步階響應中，其穩態誤差為71 %、過衝28%、以及上升時間360 μs。

An electromagnetically driven scanning mirror is studied in this thesis for application in a projector system. The scanning mirror is desired to have a larger mirror rotation angle than those for other applications. In order to sense the rotation angle, piezoresistive sensors made of polysilicon and N-well are deposited on the structure. The piezoresistives change associated with the rotation angle is converted to a voltage signal by on-chip circuits.
In this study, the TSMC 2P4M 0.35 μm process was used to integrate the electromagnetically driven scanning mirror and the sensing circuit on a chip, with a chip area of 6.4 mm × 5.8 mm. The measured slow- and fast-axis resonant frequencies are 1788 Hz and 31392 Hz, respectively. The slow- and fast-axis optical angle are 18.56° and 19.66° at the driving currents of 2.568 mApp, and 31.81 mApp, respectively. The design meets the projector SVGA specifications for the projector application. As for the sensing performance, the sensitivity of 45° N-well piezoresistor is the highest. To understand the extent to which this structure is affected by air resistance, places the scanning mirror in a pressure chamber and the pressure was reduced to 0.03 atmospheres, the Quality Factors for slow-axis torsional mode and fast-axis out-of-phase become 798 and 4056, respectively. Finally, closed-loop control system of 2 modes were implemented using Lock-in amplifier and circuitry. In the fast-axis out-of-phase mode, PI control significantly reduced the Allan deviation of both frequency and amplitude. In the closed-loop step response of the slow-axis torsional mode, the steady-state error was 71%, with overshoot 28%, and a rise time of 360 μs.