工業製造設備之工具機在執行自動化及控制過程中，機床進給之位置控制對於加工精度而言十分重要，因此必須使用具高可靠度之位置感測器，本論文針對此需求，進行設計及分析以電磁感應原理操作之渦電流位置感測器，其優勢在使用非接觸式原理進行量測，因結構簡單具有耐油污、灰塵及長壽命特性，被工業設備中大量採用。
根據文獻得知，習知渦電流感測器之設計多為空芯線圈結構，在精密加工設備對感測器量測性能規格逐漸嚴苛下，提升靈敏度、性效及精度並增強抵抗外界干擾為現今之研究趨勢，遂有在空芯線圈加入導磁鐵芯之設計結構，形成逐漸取代空心線圈之創新設計結構。
本論文針對鐵芯型渦電流位置感測器進行分析及探討，將空芯線圈結構之渦電流感測器選為基本對照組，經過變異待測物位置，紀錄位置相對感測器探頭阻抗變化後，再進行探討鐵芯在提升感測器量測性能之具體效益。首先藉由CAE電磁場分析套裝軟體進行探頭之電磁場模擬分析，研究不同感測器結構下電磁場分布及其對感測性能之影響，並設計建構一組渦電流位置量測實驗平台進行驗證過程，經過實驗分析及驗證雛型感測器結果，評估鐵芯渦電流位置感測器整體性能，提供未來設計及應用此類感測器之數據基礎。

In automation process of machine tool manufacture systems, precise position control of tool feed is crucial for final machining accuracy. To fulfill the needs, this study investigates a type of reliable eddy current position sensors based on electromagnetic induction in the targets. The sensors are capable of executing non-contact measurements and resisting oil, dust and in high temperature environments. Hence, they are widely employed in the industries.
Compared with traditional sensors constructed with air-core coils, eddy current sensors with magnetic cores provide enhanced performance to meet the increasing demands for sensitivity, accuracy, and interference resistance as technology advances.
This study investigates a ferrite-core eddy current position sensor and compares its performance with that of a traditional air-core design. By varying the position of the target object, changes in the sensor probe impedance are observed to evaluate the impact of the magnetic core on sensing performance. Commercial CAE program based on the Finite Element Method is used to simulate electromagnetic field distributions across different sensor structures. Finally, a position measurement platform for eddy current sensors is established to experimentally validate and comprehensively assess the performance of the prototype of ferrite-core eddy current position sensors.