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| 研究生： |
黃宣豪 Huang, Shiuan-Hau |
|---|---|
| 論文名稱： |
使用圖數據庫進行集群工具性能分析 Cluster Tool Performance Analysis using Graph Database |
| 指導教授： |
王俊堯
Wang, Chun-Yao |
| 口試委員: |
張世杰
Chang, Shih-Chieh 陳勇志 Chen, Yung-Chih |
| 學位類別： |
碩士 Master |
| 系所名稱： |
電機資訊學院 - 資訊工程學系 Computer Science |
| 論文出版年： | 2021 |
| 畢業學年度： | 109 |
| 語文別： | 英文 |
| 論文頁數： | 19 |
| 中文關鍵詞： | 群集工具 、晶圓 、圖形資料庫 |
| 外文關鍵詞： | Clustertool, Wafer, Graphdatabase |
| 相關次數： | 點閱：79 下載：0 |
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群集工具是一種可以批量製造晶晶圓的機器，並且被大量運用在半導體產業中。為了提高晶圓的生產率，半導體製造商希望最大限度地利用群集工具。但是，由於在不同工藝配方組合下的計劃衝突，群集工具可能無法實現其最佳利用率。通過觀察集群工具的日誌文件，我們可以找出利用率低的原因。在本文中，我們提出了一種集群工具性能分析方法。將日誌文件以圖的方式儲存在分析系統中，以分析集群工具利用率低下的根本原因。實驗結果表明我們所提出的分析系統可以在不同群集工具及配方組合都能有效找出利用率低下的原因。
A cluster tool is the place where wafers are processed. To increase the productivity of wafers, semiconductor manufacturers would like to maximize the utilization of cluster tools. However, a cluster tool may not achieve its optimal utilization rate due to the schedule conflict under different combinations of process recipes. By observing the log files of a cluster tool, we may find out the reasons of low utilization rate.
In this paper, we propose an approach of cluster tool performance analysis to analyze the root cause of low utilization rate in cluster tools. Experiments results show the effectiveness of the proposed approach.
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