半導體產業具有技術及資本密集的特色。隨著全球的產業環境日趨複雜，在面臨高度的產業競爭下，半導體企業亟思如何持續提升核心能力，維持其競爭優勢。因此，除了不斷提升技術能力外，如何達到成本控制與資源投入的最小化、產出與報酬的最大化，同時還要兼顧生產效率與製造品質，一直以來都是各個企業關注的議題。回顧過去半導體產業關於績效管理的文獻，大部分是針對企業之間的比較，即使是針對企業內部，也僅著墨於各廠區間的績效評估，對於廠區內工程部門間的效率評估則鮮少探討。一個晶圓廠的成功是由內部數個部門的績效所累積起來的成果，雖然工程部門的功勞往往不容易被看見，但不代表它的重要性可以被忽略，因為只要任何一個環節出錯，就可能造成無法彌補的傷害。本研究的目的在於建立半導體廠模組工程部門績效評估模式，蒐集2015年至2019年各部門的投入與產出資料，以紫式決策分析建構績效評估模式後，運用資料包絡分析法(Data Envelopment Analysis, DEA)求解總效率、技術效率與規模效率，藉此來衡量各部門的效率表現並分析無效率部門其效率不佳的原因。本研究進一步利用DEA中的差額變數分析結果，建議無效率部門如果要達到有效率，應該調整的那些投入項與其對應的數量，提供改善的方向與幅度，並給予決策者提升部門經營效率之參考依據，以更有效率的資源配置來增進經營績效。從實證研究的分析結果，更進一步驗證了本研究的效度與可行性。

The semiconductor industry features the characteristics of technology and capital intensity. Therefore, in addition to continuously improve technical capabilities in minimizing cost and maximizing productivity, semiconductor companies also focusing on maintain production efficiency and manufacturing quality. Most of the existing studies on the performance evaluation focus on the comparisons between companies. Even if it is for the internal company, it only focuses on the performance evaluation of each fab, and there is little discussion on the efficiency evaluation between the manufacturing engineering departments in the fab. The purpose of this study is to construct efficiency evaluation model for the manufacturing engineering department of a semiconductor company. In particular, multiple indices are used in the propsed evaluation model to measure the efficiency of the manufacturing engineering departments through UNISION decision framework and Data Envelopment Analysis (DEA) approach. Based on this model, top managers can realize each decision making unit’s efficiency. Besides, for the inefficiency DMUs, top managers can give the improvement direction and make appropriate resource allocation also. In addition, we used empirical to validate the proposed model by analyzing the pattern between production scale and efficiency. The analysis results help department managers to strength their advantage and improve their disadvantage for better efficiency performance based on the index for each departments. Thus, the results of the empirical study confirmed the validity and feasibility of the proposed approach.

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