本文討論對以鋁薄膜進行奈米直接壓印時，模具角度對下壓力以及側邊粗糙度對成型結果的影響。
一開始利用分子動力學模擬來討論不同模具角度是經由怎樣的成型機制改變來達成錐形模具下壓力降低的結果，以及不同的側邊粗糙度對於摩擦與成型機制的影響。基於此點，本文在模擬時藉由觀察不同模具角度的模具受力與下壓力以及薄膜內應力來討論接觸面上的摩擦機制以及薄膜內部的成型機制，包括下壓模式、液靜壓區以及基材效應。至於側邊粗糙度的部分則藉著提升表面粗糙度，觀察粗糙度提升後產生的連扣與犁切現象所造成的成型高度變化以及整體下壓力的改變。
為了證明模擬結果本文又進行了奈米壓印實驗，先製備矽模具與鋁薄膜並量測其幾何參數，之後進行奈米壓印實驗並將結果與模擬對照，可發現相同地當模穴填充率降低時，則表面形貌會變為雙峰且成型高度降低。並由這個對照結果可推論模具角度的模擬結果基本上是正確無誤的。

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