近年來，隨著元宇宙的概念被提出後，虛擬實境和擴增實境的各項應用開始成為大眾的焦點，而擴增實境的智慧眼鏡更是一個新穎的商品，在未來極具發展潛力，其中的關鍵成像技術便是微機電的掃描面鏡搭配雷射光束的掃描系統。本研究目標為實現一應用於擴增實境眼鏡之壓電式雙軸微掃描面鏡，透過特殊的微掃描面鏡結構設計，使掃描成像的畫面不扭曲，並達到一定的光學掃描角度以及解析度。本研究之元件能夠在沒有真空封裝的情況下，X軸於40Vpp的電壓下達到59.7度的光學掃描角，Y軸於26Vpp的電壓下可達到7.8度的光學掃描角；雙軸同時驅動時，可掃出一個利薩茹的掃描圖形，且成像四邊皆平直方正。最後進行元件的失效分析，針對雙軸微掃描面鏡之走線分佈提出分析結果，並且計算壓電材料之斷裂應力，用以提供後續設計上的一些相關準則。

As the concept of the metaverse has been prevailed in recent years, a variety of applications of virtual reality (VR) and augmented reality (AR) have gained lots of interest. AR glasses have particularly emerged as a novel product with promising potential in the future. The corner stone of projection technology consists of micro-electro-mechanical system (MEMS) scanning mirror and laser beam projection system. This study aims to realize a piezoelectric bi-axial MEMS scanning mirror for AR glasses, and achieve non-distortion scanning image by novel structural design. The device developed in this study can achieve a horizontal scanning angle of 59.7° when driven by 40Vpp sinusoidal-signal (6.6 kHz) and vertical scanning angle of 7.8° when driven by 26Vpp sinusoidal-signal (16 kHz), while there's no vacuum packaging needed. Besides, the Lissajous scanning pattern with straight edges could be successfully achieved. Finally, the failure modes of the device were also analyzed to summarize relative design guidelines for future structural enhancement.

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