The research of use Metal-assisted Chemical Etching (MAE) to fabricate modified grating structure solar cell

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研究生：	茅一鈞 Mao, Yi-Chun
論文名稱：	The research of use Metal-assisted Chemical Etching (MAE) to fabricate modified grating structure solar cell 使用金屬輔助化學蝕刻方式製作改良式柵欄狀結構太陽電池之研究
指導教授：	黃惠良 Hwang, Huey-Liang
口試委員:	邱福千林堅楊
學位類別：	碩士 Master
系所名稱：	電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering
論文出版年：	2011
畢業學年度：	99
語文別：	英文
論文頁數：	68
中文關鍵詞：	多孔矽結構、太陽電池、銀蝕刻
外文關鍵詞：	grating, MAE, porous Si, solar cell
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In this thesis, the modified grating solar cell was fabricated on the single-crystalline and multi-crystalline p-type Si substrate by the metal-assisted chemical etching (MAE) method, the structure morphologies was analyzed by SEM. In single-crystalline part, a extra damage elimination process by HNO3/HF/H2O=50:1:20 was added in the original process flow. And the low F.F. performances of the fabrication in the first process flow were referred to the series resistance caused by the unperfect M/S contact. A longer FGA annealing process was applied to solved this problem. The solar cell conversion efficiency before and after these process were added with 1.8-3% enhancement. The highest conversion efficiency of the solar cell reaches 10.079%. In the multi-crystalline part, there were two process flow, too. A saw damage removal step was added before all the processes. The conversion efficiency enhancement of this process were about 1.7%. The highest conversion efficiency of multi-crystalline solar cell was 5.686%.

在本篇論文中，我們使用金屬輔助的化學蝕刻方法在單晶矽與多晶矽的基板上製作出修正型的柵欄狀結構太陽能電池。而這些蝕刻的結構與形狀都使用掃描式電子顯微鏡來做分析。在單晶矽基板部分，我們增加了一個額外去除表面結構損傷的製程步驟，使用HNO3/HF/H2O=50:1:20混合的蝕刻液來作處理，另外在第一個流程製作出的元件裡，我們認為填充因子(Fill Factor)數值偏低是因為不完美的金屬與半導體接面所造成，因此我們增加了FGA 高溫退火的時間來改進這個問題。而太陽電池的光電轉換效率在增加與改進了這兩個步驟之後有了1.8-3%的提升，其中最高的轉換效率可以達到10.079%。在多晶矽基板的部分，我們也設計了兩個製作流程，差別在於後者在所有的製程步驟之前對基板增加了一個切割損傷的製程，而這個製程對於最後元件的轉換效率大約增加了1.7%，而最高的多晶矽太陽電池光電轉換效率為5.686%

Contents
Chapter 1  Introduction
  1.1 Background……………………………………………….………1
  1.2 Introduction of solar cell types………………………….……….2
  1.3 Properties of sunlight…………………………………….………4
  1.4 Research motivation……………………………………….……..7
  1.5 Metal-assisted chemical etching (MAE)
     1.5.1 Introduction………………………………………………...8
     1.5.2 Physical mechanisms and reactions…………………….....9
  Reference…………………………………………………………….12
Chapter 2  Solar cell operation
  2.1 The solar cell structure………………………………………….13
  2.2 The parameters of solar cell
     2.2.1 The current and voltage characteristic…………………..15
     2.2.2 Short circuit current………………………………………16
     2.2.3 Open circuit voltage……………………………………….17
     2.2.4 Fill factor…………………………………………………..18
     2.2.5 Efficiency…………………………………………………..19
  2.3 Efficiency loss analysis of solar cell…………………………….20
  Reference…………………………………………………………….24
Chapter 3  Introduction to the experimental equipments
  3.1 Major experimental equipments
     3.1.1 RF sputter system…………………………………………25
     3.1.2 Plasma enhanced chemical vapor deposition
(PECVD)…………………………………………………....27
     3.1.3 High temperature diffusion/forming gases annealing
furnace……………………………………………………...29
     3.1.4 Metallization………………………………………………30
  3.2 Measure equipments
     3.2.1 Field emission scanning electron microscope (SEM)…...32
     3.2.2 Solar simulator…………………….………………………33
  Reference………………………………………………………….....35
Chapter 4  Experimental processes and results
  4.1 Processes and results of single-crystalline Si solar cell
     4.1.1 Process flow..........................................................................36
     4.1.2 Surface texture fabrication.................................................37
     4.1.3 Results of the MAE structures...........................................39
     4.1.4 Solar cell manufacturing on single-crystalline Si............46
     4.1.5 The rough surface morphology made by MAE
process...................................................................................48
     4.1.6 Solar cell reproduced according to the modified
         process flow...........................................................................52
  4.2 Processes and results of multi-crystalline Si solar cell
     4.2.1 Process flow..........................................................................55
     4.2.2 Results of MAE texturing...................................................56
     4.2.3 Solar cell manufacturing on multi-crystalline Si
         and the results.......................................................................58
     4.2.4 Saw damage removal on solar grade multi Si wafer.......60
     4.2.5 The modified process flow of multi-crystalline Si
         solar cell fabrication and the results...................................63
  Reference.............................................................................................65
Chapter 5  Conclusions and Future works............................ 66

                                

Chapter 1
[1] Global Renewable Energy AG
Http://www.gre-gmbh.eu/en_solarenergie.php
[2] KRI Report NO.8: Solar Cells, February 2005
[3] Photovoltaics CDROM Christiana Honsberg and Stuart Bowden
Http://pvcdrom.pveducation.org/index.html
[4] H. L. Hwang, D. C. Liu, J. E. Lin, J. J. Loferski, J. Appl. Phys. 52 (1981) 1548.
[5] X. Li, P. W. Bohn, Appl. Phys. Lett. 77 (2000) 2572
[6] Z. Huang, N. Geyer ,P Werner , J. d. Boor , and U. Gösele ,Adv. Mater. 2011, 23, 285–308

Chapter 2
[1] Photovoltaics CDROM Christiana Honsberg and Stuart Bowden
Http://pvcdrom.pveducation.org/index.html
[2] Peter Wurfel, “Physics of Solar Cells”, WiLEY-VCH (2005)
[3] 廖士霆,國立清華大學材料科學與工程學系研究所碩士論文,
”矽晶太陽電池製作與特性分析” ,98年
[4] Seminar Report On Losses In Solar Cells by Vikrant A.Chaudhari,2006.

Chapter 3
[1] 陳學龍，王水進〝IZO透明金屬薄膜之研製及其在GaN基LEDs
之應用研究〞，國立成功大學微電子工程研究所2002
[2] 張勁燕，〝半導體製程設備〞，五南圖書出版股份有限公司，2004年4月二版三刷
[3] Tomas Markvart, ”Solar electricity” JOHN WILEY &SONS (1994)
[4] James D. Plummer , Michael D. Deal, and Peter B. Griffin, Silicon VLSI Technology, Chapter 9 ,(2000)
[5] Sciencetech web page. http://0rz.tw/6a48z

Chapter 4
[1] 施宜廷，國立清華大學電子工程研究所碩士論文，〝使用雷射對矽晶片進行表面粗糙化形成蜂巢狀太陽能電池〞，九十九年
[2] Z. Huang, N. Geyer ,P Werner , J. d. Boor , and U. Gösele , “Metal-Assisted Chemical Etching of Silicon: A Review”Adv. Mater. 2011, 23, 285–308
[3] H. Park , S Kwon , J. S. Lee , H. J. Lim , S. Yoon , D. Kim,Solar Energy Materials & Solar Cells 93 (2009) 1773–1778

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