陀螺儀在各方面的應用越來越重要，傳統的陀螺儀體積大且軸承易磨耗，而微加工的振動式陀螺儀以振動式的方式感應角速度的變化，因結構簡單沒有磨耗問題操作壽命長且體積小。
本研究中，先以有限元素法模擬三種微型陀螺儀之振動模態，藉此驗證其可行性，設計出 coupled type 與 decoupled type 之微型陀螺儀。後續利用微機電加工技術，藉由陽極接合、蝕刻、微影、非等向性深蝕刻等製程，以製造一以靜電力驅動、電容感測之振動式微型陀螺儀。第一代微型陀螺儀之驅動頻率與感測頻率皆為61kHz，為 coupled type；第二代微型陀螺儀之驅動頻率為 45.68kHz、感測頻率為 45.86 kHz，為decopuled type；第三代微型陀螺儀之驅動頻率與感測頻率皆為 6.7kHz，為coupled type。

The gyrp is getting more and more important in many fields. A traditional gyro has some drawbacks, for examples, it is bulk in volume and wear of bearings is not avoidable. However, the vibratory micro gyro can senses the changes of angular velocity based on conservation of momentum. Due to its structure, the gyro doesn’t have the wearing problem and has long operation time.
This research used finite element analysis to simulate the vibration mode of three kinds of gyro, including two coupled type micro gyros and one decoupled type micro gyro. After the simulation results, these gyros were fabricated by micro-fabrication process, including anodic bonding, lithography, and deep RIE. These gyros are driven by electrostatic force and detected by sensing the changes of capacity. The driving frequency and sensing frequency of first generation micro gyro are both 61 kHz. The driving frequency of second generation micro gyro is 45.68 kHz, with the sensing frequency is 45.86 kHz. The driving frequency and sensing frequency of third generation micro gyro are both 6.7 kHz

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