微機電領域有十分巨大的研究發展及產業價值，有許多的研究團隊投入相關領域的研究與找尋發展契機。因此，本文第一部分先以自行架設之曝光系統，進行相關曝光參數的最佳化測式後，再將其應用於進行微影製程。在進行微機電技術結合於生物醫學研究之實務應用上，由於微機電元件尺寸與細胞大小接近，適合結合於微觀之生物醫學領域上，常稱作生物晶片。其中，利用微影製程進行圖形化定義後進行細胞排列為細胞圖形化技術常用之方法，而細胞載具則特指運輸細胞之設計。故本論文第二部分將以架設完善之曝光系統，應用於製備磁膜圖形細胞載具，藉由磁性材料可於外加的磁場調變的概念，以其設計圖性化之磁性微結構以達成運輸及操控細胞的空間分布之目的。本文最終已驗證自製曝光系統之可行性並發展出一套適用於實驗室環境之曝光系統，且將此系統實際應用磁膜圖形細胞載具之製作與實驗中，於微機電結合生醫之應用十分具淺力與發展價值。

Microelectromechanical Systems (MEMS) has been attracted for both academy and industry. New applications are emerging since the existing of MEMS technology. In the first part of the thesis, an exposure system for photolithography had been established and the related parameter had been optimized for the later experiments. Since the size of MEMS devices is similar to the biological cells, they are suitable to be integrated into biomedical application system. Therefore, the second part of the thesis is to apply the exposure system to fabricate micro-patterned vehicles for carrying biological cells. Since the magnetic based devices could be remote-controlled by external magnetic field, a magnetic based cell vehicles with particular pattern had been fabricated to manipulate biological cell and pattern cell spatially. The results of the thesis have demonstrated the functionality of the photolithography exposure system and the adaptation as fabrication equipment for common laboratories. The success in fabricating the magnetic patterned cell vehicle had shown the potentiality of the exposure system in research field of Bio-MEMS.

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