單層二硫化鎢上吸附原子遷移之探討｜國立清華大學博碩士論文庫

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研究生：	曾崇瑋 Tseng, Chung-Wei
論文名稱：	單層二硫化鎢上吸附原子遷移之探討 Adatoms Migration on Monolayer Tungsten Disulfide
指導教授：	邱博文 Chiu, Po-Wen
口試委員:	林永昌 Lin, Yung-Chang 李奎毅 Lee, Kuei-Yi
學位類別：	碩士 Master
系所名稱：	理學院 - 物理學系 Department of Physics
論文出版年：	2019
畢業學年度：	108
語文別：	中文
論文頁數：	76
中文關鍵詞：	二維材料、吸附原子、實時影像、掃描穿透式顯微鏡
外文關鍵詞：	2d material, adatoms, in-situ image, STEM
相關次數：	點閱：2 下載：0
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吸附原子在二維材料上的遷移行為是基礎科學中重要的資訊。我們嘗試用化學氣相沉積法製備銦吸附原子於單層二硫化鎢的系統，並且利用掃瞄式穿透電子顯微鏡觀察銦吸附原子的遷移行為並進行分析。我們發現在非晶碳較少的區域，銦原子的遷移行為與理論計算的結果一致；然而非晶碳較多的區域其遷移行為則與理論計算結果稍微不同。

Adatoms migration on 2d material is important for fundamental science. In this thesis, first, we prepare our system - Indium adatoms on monolayer tungsten disulfide by the method of CVD. Then, by taking advantage of the STEM technique, we detect the migration of adatoms by in-situ ADF-STEM images. Experiment results show the same trend as theoretical calculation in clean regions, while slightly different in amorphous carbon-rich regions.

論文摘要......................................................... I
Abstract.........................................................III
致謝............................................................. V
目 錄 ..........................................................VIII
第一章 序論..................................................... 1
1.1 半導體科技發展史 . . . . . . . . . . . . . . . . . . . ..  . 1
1.2 二維材料發展 . . . . . . . . . . . . . . . . . . . . . . . . 2
1.3 吸附原子於過渡金屬二硫屬化物 . . . . . . . . . . . . . . . . 5
1.4 論文結構 . . . . . . . . . . . . . . . . . . . . . . . . . . 6

第二章 二維材料介紹.............................................................. 7
2.1 石墨烯 (Graphene) . . . . . . . . . . . . . . . . . . . . . .7  2.1.1 晶體結構 (Lattice structure) . . . . . . . . . . . . . . . 7
2.1.2 電學性質 (Electrical properties) . . . . . . . . . . . . . 8
2.2 二硫化鎢 (Tungsten disulfide) . . . . . . . . . . . .. . . . 14 2.2.1 晶體結構 (Lattice structure) . . . . . . . . . . . . . . . 14 2.2.2 電學性質 (Electrical properties) . . . . . . . . . . . . . 16
第三章 材料成長與檢測............................................................... 19 3.1 石墨烯成長與檢測 . . . . . . . . . . . . . .. . . . . . . . . 19 3.1.1 成長設備 . . . . . . . . . .. . . . . . . . . . . . . . . . 20
3.1.2 流程與參數 . . . . . . . . . . . . . . . . . . . . . . . . 21
3.1.3 拉曼光譜檢測 . . . . . . . . . . . . . . . . . . . . . . . 22

3.2 成長吸附銦原子二硫化鎢及檢測 . . . . . . . . . . . . . . . . . 27 3.2.1 成長設備 . . . . . . . . . . . . . . . . . . . . . . . . . . 27 3.2.2 流程與參數 . . . . . . . . . . . . . . . . . . . . . . . . 30 3.2.3 光學顯微鏡、拉曼光譜及光致螢光光譜檢測 . . . . . . 35
3.3 沿石墨烯側向成長吸附銦原子二硫化鎢及檢測 . . . . . . . . . 39
3.3.1 流程與參數 . . . . . . . . . . . . . . . . . . . . . . . . 40 3.3.2 拉曼光譜檢測 . . . . . . . . . . . . . . . . . . . . . . . 42
第四章 掃瞄式穿透顯微鏡實驗結果與分析............................................. 43
4.1 TEM影像 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 4.2 吸附原子之準實時影像分析 . . . . . . . . . . . . . . . . . . . 46 4.2.1 實時影像­1 . . . . . . . . . . . . . . . . . . . . . . . . . 48 4.2.2 實時影像­2 . . . . . . . . . . . . . . . . . . . . . . . . . 62
第五章 結論............................................................... 71
參考文獻.................................................. 73
                                

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