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研究生: 許惠婷
Hui-Ting Hsu
論文名稱: 表面張力驅動之陣列式微型混合器之研製
The Design and Research of Passive Micromixer Arrays
指導教授: 曾繁根
Fan-gang Tseng
口試委員:
學位類別: 碩士
Master
系所名稱: 原子科學院 - 工程與系統科學系
Department of Engineering and System Science
論文出版年: 2004
畢業學年度: 93
語文別: 中文
論文頁數: 86
中文關鍵詞: 混合器濃度梯度微流體微機電
外文關鍵詞: mixer, concentration gradient, microfluid, MEMS
相關次數: 點閱:2下載:0
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  • 本研究設計一陣列式微型混合器,以表面張力做為驅動力,透過
    特殊開放式的微流道網絡與混合腔體設計,利用壓力差完成有效定
    量、同步且快速的混合效果。晶片中特殊流道的網絡設計,可定量不
    同體積比例的二欲混合流體,並利用電濕潤法與流道梯度設計造成的
    壓力差將其同時、反向地引流至混合腔體內,其後,利用兩反向流體
    造成的介面作用力,在陣列式的混合腔體(250x250x60μm3) 中生成三維渦流,達到體積定量、快速且陣列式同步混合效果。

    研究中探討四種不同腔體次結構設計(基礎型、橫閂型、導角型、
    改良式橫閂型)與三代陣列式微型混合器對混合效率的影響。逆時針
    長橫栓的次結構設計混合效率較佳,其可限制流體進口長度與混合區
    域、影響混合介面長度,使兩液體在160ms 內造成均勻且快速的混合;搭配第三代陣列式微型混合器的外部定量設計,可一次多工地完成不同濃度樣品的混合需求。

    研究中利用微粒子顯像測速儀觀測混合腔體內部的流場,搭配
    CFD-RC 軟體的模擬結果,了解液體在腔體內三維渦流的形成狀況及
    物理機制。此外,透過高速流體攝影系統與螢光樣品實驗,了解混合效率。


    頁數 摘 要 Ⅰ 誌謝 Ⅱ 目錄 Ⅲ 圖目錄 Ⅵ 表目錄 Ⅹ 第一章 緒論 - 1 - 1-1 研究背景 - 1 - 1-2 文獻回顧 - 2 - 1-2.1 微型混合器 - 2 - 1-2.2 混合效果的評估方法 - 6 - 1-2.3 定量混合機制 - 9 - 1-2.4 液體驅動機制 - 11 - 1-3 研究方向與架構 - 15 - 第二章 理論分析 - 17 - 2-1 微觀流體的物理特性: - 17 - 2-2 微觀混合機制 - 18 - 2-3 定量試劑的填充機制 - 20 - 第三章 微型混合器晶片設計與製程規劃 - 22 - 3-1 晶片設計概念 - 22 - 3-1.1 混合腔體設計概念 - 23 - 3-1.2 第一代陣列式微型混合器 - 23 - 3-1.3 第二代陣列式微型混合器 - 24 - 3-1.4 第三代陣列式微型混合器 - 25 - 3-2 製程步驟 - 28 - 3-2.1 第一代陣列式微型混合器製程步驟: - 28 - 3-2.2 第二代陣列式微型混合器製程步驟 - 30 - 3-2.3 第三代陣列式微型混合器製程步驟 - 33 - 3-3 SU-8厚膜光阻特性與特殊製程條件 - 36 - 3-4 TEFLON疏水特性與製程探討 - 41 - 3-5 製程問題探討 - 42 - 第四章 結果分析與討論 - 50 - 4-1 實驗設備與材料 - 50 - 4-1.1 流體觀測設備 - 50 - 4-1.2 實驗材料 - 55 - 4-2 結果分析與討論 - 56 - 4-2.1 製程結果 - 56 - 4-2.2 螢光反應校正與µPIV量測深度校正 - 56 - 4-2.3 不同設計之混合效率分析 - 57 - 4-2.4 混合流場物理現象 - 59 - 4-2.5 第一代陣列式微型混合器之測試 - 59 - 4-2.6 第二代陣列式微型混合器之測試 - 60 - 4-2.7 第三代陣列式微型混合器之測試 - 60 - 第五章 結論與未來工作 - 79 - 5-1 結論 - 79 - 5-2 未來工作 - 81 - 參考文獻 - 82 -

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