本論文主要針對兩種不同材料磊晶而成之薄膜系統，其為將InN單晶薄膜磊晶於藍寶石單晶基底上，使用泵浦探測實驗方法進行之時間解析X光繞射實驗提出理論計算與實驗模擬。

以C. Thomsen等人提出之理論計算[5]為基礎，進而提出雷射激發應變在此分層系統內傳遞之理論計算，並使用X光多層薄膜系統繞射[6]模擬量測之X光反射率變化，得到理論模擬之時間解析X光繞射實驗量測結果。

成功模擬得到時間解析X光繞射實驗中，X光反射率於不同量測時間以及不同X光入射角下之量測結果。

This thesis aims to propose theoretical calculations and experimental simulation for the time-resolved X-ray diffraction which is using the pump & probe experimental method in the system of epitaxial thin film of two different materials. The system is an InN epitaxial single-crystal thin film grown on sapphire substrate.

We use the theory which is proposed by C. Thomsen[5], and then put forward the theoretical calculations of the laser induced strain propagating in a layered system.
We also use the system of X-ray diffraction in multi-layer thin films to simulate the X-ray reflectance in the time-resolved X-ray diffraction experiment.

Under different times and X-ray incidence angle, we successfully simulate the measurement results of the time-resolved X-ray diffraction experiment.

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