本研究利用半數位式鎖相迴路，將微致動器驅動在其共振頻率上，其中，微元件僅需符合高品質因子、共振頻率在千赫茲等級、且可等效為二階系統等條件。相較於以往使用類比式鎖相迴路而言，因迴路穩定性不受輸入訊號振幅大小影響，故在不調整任何迴路參數的情況下，其適用的系統變得更為廣泛，而相較於利用適應性控制驅動微元件的方式來說，則整體架構較為容易實現。
經由迴路設計與軟體模擬，使整體迴路可以針對驅動對象的共振頻率達成穩定且快速的鎖定，而整體驅動架構亦利用市售電子元件加以實現，並使用RLC電路等效多組不同參數的二階系統，驗證驅動迴路應用在不同品質因子或不同結構共振頻的系統上，均可達成穩定的鎖頻。
以共振頻率分別在6.02 kHz與4.35 kHz左右的微掃描鏡做為驅動實驗對象，成功達到鎖頻的目標，驗證此驅動架構可使微元件被驅動在其結構共振頻率上，並得到最大振幅的輸出。未來若應用在微陀螺儀上，將可提升其感測角速率之靈敏度。

The present study has employed the half-digital phase-locked loop (PLL) as the driving system to ensure the microacuator working frequency fixed on its resonant frequency. Because there is no influence on the stability of half-digital PLLs when the amplitude of input signal is changing, the half-digital PLL is more robust than the analog PLL.
Matlab/Simulink 7.1 is used in the simulation with the designed PLL. In terms of implementation, the off-the-shelf IC components are used to realize the PLL driving system, and applied to drive the RLC circuits and micro scanning mirrors. In the experimental results, the designed PLL successfully tracks the resonant frequency of micro scanning mirrors and RLC circuits with various system parameters.
In the future, the driving system can be used in driving micro-gyroscope for sensitivity-promoting.

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