傳統光通訊網路的切換方式是以控制電子形式的切換開關來交換訊號。這種切換形式在攜帶少量資訊傳輸的情況下尚可應付，但隨著網際網路的盛行，光纖訊號傳輸量日漸增多，此時非電訊號所能處理。為了能解決這樣問題，必須使光通訊網路進入新的境界─全光網路(All-optical Network)架構。在此一架構下必須透過光通訊開關有效應付龐大資訊量，直接處理交換光形式資料。未來，全光網路架構已成為光通訊網路發展的重要趨勢，光通訊開關更成為全光網路架構的效能指標。。
以微機電系統所設計的光通訊開關，其機制可利用機械特性控制微小鏡面移動或轉動，藉由鏡面反射得以改變光行經的路線，而達成光切換的目的。本文將提出整合表面微加工技術與深蝕刻技術兩種製程技術來製作光通訊開關，具有大靜電力與大角位移且鏡面不需人工對準挑起而能達到自我組裝的目的。致動器方面選擇旋轉型靜電梳狀致動器，鏡面部分則是利用濺鍍的方式沉積鋁金屬作為反射鏡面，而樞軸驅動則使用有機材料Polyimide，烤乾後產生表面張力可將微鏡面抬起，為了確保鏡面抬昇後其法線方向能與入射光線行進方向平行，設計卡榫式微結構使鏡面固定與水平面相交於90度。

本文將描述旋轉型光通訊開關元件的幾何尺寸設計、理論模型建立、ANSYS靜態模擬分析與共振頻分析、微加工製程、完成的工作進度以及未來製程改進。

Traditionally, optical network switches are performed via electron to exchange optical data information. The optical-electrical-optical conversion would lead to slow data transformation. The mature of internet and optical Dense Wavelength Division Multiplexing(DWDM) required and also make possible impressive transmission capacities. The data transmissions per single-mode fiber have been over thousands of gigabits. Thus, it is hard to exchange data information by using electronic-switched networks. To resolve this problem, all-optical switching fabrics are expected to play a key role. This device, in this proposal, allows switching directly in the optical domain, and avoids the need of optical-electrical-optical conversions. In the future, all-optical network frame is expected to be the trend for optical telecommunication networks. Optical switches will be the key devices in all-optical network architectures
Optical switches change the path of optical signals via either BAR or CROSS state. MEMS switches generally use either movable or rotational micro-mirrors to deflect optical signals from input to output fibres. In this paper, We develop a micromechanical optical fiber switch to regulate light beams in free-space by using electrostatic rotary comb drive actuators. The reflective mirror above the actuator is made by depositing an aluminum layer. We will use organic material, polyimide, as the hinge driver. After curing process, the hinge driver generates the surface tension force. For releasing the sacrificial layer below the mirror, the hinge driver raises the micromirror out of plane. In order to ensure that mirror can keep with right vertical angle, we utilize the micro lock-mechanism to fix mirror vertically.

In this paper, we will develop innovative fabrication processes for our optical switches via integrating surface micromachining with ICP-RIE. The modeling and simulation of our optical switch are reported.

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