電子相位斷層掃描術之研究｜國立清華大學博碩士論文庫

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研究生：	蔡俊穎 Tsai, Chun-Ying
論文名稱：	電子相位斷層掃描術之研究 Studies of Electron Phase Tomography
指導教授：	陳福榮 Chen, Fu-Rong 開執中 Kai, Ji-Jung
口試委員:
學位類別：	碩士 Master
系所名稱：	原子科學院 - 工程與系統科學系 Department of Engineering and System Science
論文出版年：	2010
畢業學年度：	98
語文別：	中文
論文頁數：	78
中文關鍵詞：	相位、斷層掃描術、電子顯微鏡、繞射對比
外文關鍵詞：	Phase, Tomography, TEM, diffraction contrast
相關次數：	點閱：1 下載：0
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摘要

隨著奈米科技不斷的創新與突破，穿透式電子顯微鏡(Transmission Electron Microscopy, TEM)在近十年來為材料分析領域的寵兒，但在一般TEM的影像為電子穿透式片後所投影之二維影像，如何探討材料內部的複雜的三維分布情形則是TEM影像的一大挑戰，為此，我們必須借重於電子斷層掃描術(Electron Tomography)來重建出材料的三維影像。此外，由於電子對於不同原子序的原子有不同之繞射能力，在三維影像中會出現因為繞射對比所造成的假影，為了消除繞射對比，我們利用一系列欠焦影像回復相位影像並結合此相位影像與電子斷層掃描術，為電子相位斷層掃描術(Electron Phase Tomography)，期能消除繞射對比所造成的假影。
本論文分為兩個部份，第一部份為從製作TEM樣品開始，建立一套單傾轉軸電子斷層掃描術的方法，並且利用Fe3O4立方體奈米顆粒做此方法可行度之驗證，最後則是應用於未知三維結構的Fe3O4削稜截角立方體奈米顆粒上。第二部份則是利用已知結構的FePt@Fe3O4核心殼奈米顆粒之TEM影像，證明若是材料內部有較重之核心元素，會因為繞射對比而在三維重構的結果中造成人工假影。因此我們提出利用利用傳遞強度方程(Transport of Intensity Equation)來回復系列傾轉角度之相位的訊息，由於相位影像中的對比來自於材料本身與電子散射能力的大小，因此繞射對比可以被忽略，最後利用此相位影像來進行電子相位斷層掃描術之研究，以期未來能夠解決高密度孔洞內含有重元素核心之樣品，在電子斷層掃描中會因為人工假影造成判斷困難的問題。

章節目錄
章節                                                                   頁碼
摘要  ...................................................................................................................................  i
章節目錄....................................................................................................................iv
表目錄................................................................................................................vii
圖目錄....................................................................................................................viii
第一章  緒論............................................................................................1
     1.1 前言........................................................................................ 1
     1.2 傾轉系列斷層掃描術的..................................................................................2
     1-3 穿透式X光顯微鏡斷層掃描術...............................................................4
     1-4 穿透式電子顯微鏡斷層掃描術............................................................. 5
     1-5 相位回復...................................................................................................5
     1-6 電子相位斷層掃描術.....................................................................................7
     1-7 實驗軟體簡介................................................................................................8
第二章 實驗流程與原理..................................................................................16
     2.1  樣品製備.........................................................................................16
     2.1.1  奈米金顆粒的標記............................................................................................16
     2.1.2  試片的裁剪......................................................................................16
     2.2  電子斷層掃描三維重構...................................................................................17
     2.3  影像截取........................................................................................................17
     2.3.1  試片高度調整.........................................................................................17
     2.3.2  影像截取.........................................................................................................17
     2.4  影像校正.............................................................................................................18
     2.5  三維影像重建...................................................................................................19
     2.5.1  Radon 轉換.............................................................................................20
     2.5.2 傅立葉切片理論....................................................................................20
     2.5.3  濾波反投影法...................................................................................22
     2.6  三維影像可視化...................................................................................................22
     2.7  雜訊處理.......................................................................................................23
     2.7.1  遮罩運算(Mask Operation)...........................................................................23
     2.7.2  高斯濾波器(Gaussian Filter).....................................................................24
     2.7.3  平均濾波器(Mean Filter).........................................................................24
     2.7.4  排序濾波器(Rank Filter)...................................................................25
     2.7.5  二值化濾波器........................................................................................25
     2.8  相位回復....................................................................................................26
     2.8.1  強度傳遞方程推導....................................................................................26
     2.9  材料微結構分析 ................................................................................................28
     2.9.1  場發射穿透式電子顯微鏡算.......................................................................28
     2.9.2  掃描穿透式電子顯微鏡.......................................................................28
     2.9.3  X光粉末繞射法..............................................................................29
第三章 結果與討論.................................................................................................43
     3.1  奈米金顆粒分散性結果.......................................................................43
     3.2  影像處理結果.........................................................................................43
     3.3  Fe3O4立方體奈米顆粒斷層掃描術結果..............................................44
     3.4  Fe3O4削稜截角立方體奈米顆粒斷層掃描術結果...................................44
     3.5  電子斷層掃描術影像失真問題..............................................................45
     3.6  高角度環狀暗場雙傾轉軸斷層掃描術結果.........................................46
     3.7  電子斷層掃描術的繞射對比問題.....................................................47
     3.8  電子相位斷層掃描術..........................................................................47
     3.9  FePt@Fe3O4核心殼奈米顆粒相位理論計算..............................................48
第四章 結論.........................................................................................................73
第五章 未來研究方向....................................................................................................74
第六章 參考文獻......................................................................................................75

                                

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