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| 研究生： |
吳信彥 Thin-Yan Wu |
|---|---|
| 論文名稱： |
薄膜太陽能電池吸收層CuInS2之預沉積層CuIn的相形成及快速熱升溫退火處理過程 Phase Formation of CuIn Precursor and Rapid Thermal Process (RTP) of Thin Film Solar Cell Absorber CuInS2 |
| 指導教授： |
黃惠良
Huey-Liang Hwang |
| 口試委員: | |
| 學位類別： |
碩士 Master |
| 系所名稱： |
電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering |
| 畢業學年度： | 92 |
| 語文別： | 中文 |
| 論文頁數： | 64 |
| 中文關鍵詞： | 熱快速升溫處理過程 、銅銦硫 、太陽能電池 、硫化 |
| 外文關鍵詞： | RTP, CuInS2, solar cell, sulfurization |
| 相關次數： | 點閱：177 下載：0 |
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因為地球上石油的逐漸耗盡，伴隨而來的是能源取得的危機，因此取得一個可以永久使用的能量來源是必須的，所以我們想到利用太陽電池來儲存太陽能是最合適的，而太陽能電池材料中，一三六族與二六族半導體材料為最具未來發展潛力者，雖然目前市面上已有以其他材料所生產的太陽能電池，但是普遍製程繁瑣且價格昂貴，若是達到人人皆有能力購買且符合經濟效益還有一段距離，因此成長低成本高吸收效率的異質p-n接面太陽能電池為目前的首務之急。
Chapter 1 Introduction …………………………1
1-1 Introduction……….................................................................1
1-2 Basic principle of solar cell………………………………….1
1-2-1 Photovoltaics working process…………………………..2
1-2-2 p-n junction………………………………………………5
1-3 Chalcopyrite semiconductor based solar cell………………..7
1-3-1 Typical fabrication procedure and full in-line concept……7
1-3-2 Chalcopyrite material absorber layer………………………9
1-3-3 Buffer layer………………………………………………...10
1-3-4 Window layer……………………………………………….11
Chapter 2 Experiments………………………….13
2-1 Sputter deposition theory……………………………………13
2-1-1 Physics of RF sputter…………………………………...14
2-2 Rapid Thermal Process (RTP) Deposition Theory ………...15
2-3 Experimental procedures…………………………………...16
Chapter 3 Results and discussion.……………..19
3-1 CuIn film prepared by low power RF magnetron sputtering…..19
3-2 CuIn film prepared by higher power RF magnetron sputtering…21
3-3 CuIn film prepared by higher substrate temperature during RF magnetron sputtering……………………………………………22
Chapter 4 Conclusion.…………………………..25
Tables…………………………………………………………………...27
Figures…………………………………………………………………32
References……………………………………………………………..63rf
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9. Hiroaki Matsushita, Tomohiro Mihira, Takeo Takizawa, “Chemical reaction process and the single crystal growth of CuInS2 compound”, Journal of Crystal Growth 197 (1999) pp169-176
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11. Takayuki WATANABE, Hidenobu NAKAWA and Masahiro MATSUI, “Improved Efficiency of CuInS2 -Based Solar Cells without Potassium Cyanide Process”, Jpn. J. Appl. Phys. 38 (1999) pp. L1379-1381
12. M. Gossla, H. Metzner, and H.-E. Mahnke, “Coevaporated Cu—In films as precursors for solar cells”, J. Appl. Phys., 86 (1999) pp3624-3632
13. Yoshio Onuma, Kenji Takeuchi, Sumihiro Ichikawa, Mina Harada, Hiroko Tanaka, Ayumi Koizumi, Yumi Miyajima, “Preparation and characterization of CuInS_ thin films solar cells with large grain”, Solar Energy Materials & Solar Cells 69 (2001) pp261-269
14. C.Dzionk, H. Metzner, H. J. Lewerenz, and H.-E. Mahanke, “Perturbed angular correlations study of thin Cu-In films”, J. Appl. Phys., 78 (1995) pp2392-2396
15. 張昆輝,國立清華大學電子工程研究所碩士論文 90年
16. 鍾堂軒,國立清華大學電子工程研究所碩士論文 89年
17. 余濟時,國立清華大學電機工程研究所碩士論文 85年
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