研究生: |
胡嘉德 Chia-Te Hu |
---|---|
論文名稱: |
以PECVD製備奈米碳管量子點及其氣體偵測與光電性質應用 PECVD carbon nanotubes quantum dots for gas sensor and optoelectronics |
指導教授: |
施漢章
Han C. Shih 葉均蔚 Jien W. Yeh |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 材料科學工程學系 Materials Science and Engineering |
論文出版年: | 2008 |
畢業學年度: | 96 |
語文別: | 中文 |
論文頁數: | 154 |
中文關鍵詞: | 奈米碳管 、氧氣電漿處理 、導電特性 、場發射 、氣體偵測 、酒精 、奈米混成複合物 、光電特性 |
外文關鍵詞: | Carbon nanotubes, Oxygen plasma treatment, Electronic properties, Field emission, Gas sensor, Ethanol, Nano2hybrids composites, Optoelectronics properties |
相關次數: | 點閱:2 下載:0 |
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本研究是以微波電漿輔助化學氣相沉積系統來合成奈米碳管,並觀察其顯微結構之改變與化學鍵結及電子場發射性質。採用基板夾層方式可順利合成出具方向性奈米碳管,不需額外施加偏壓亦或是定義催化劑圖譜。
藉由MPECVD 氧氣電漿處理奈米碳管表層,可增加其SP2鍵結,在氣體吸附、導電特性及場發射應用上皆可提升其性質。由多壁奈米碳管所構成的氣體感測器可成功於酒精氣體上作偵測,偵測濃度達ppm等級,其導電度在室溫下隨酒精氣體的通入而下降。本實驗成功以奈米碳管作為氣體偵測器將為奈米尺度電子偵測元件打開一新的紀元。
半導體性量子點展現出優異的量子侷限效應而備受關注,而氧化鋅為一著名具寬能隙與高光激發效能的Ⅱ-Ⅵ族半導體性材料,在此研究中,將利用熱蒸鍍法合成奈米混成複合物C-Z-O(Carbon-Zinc-Oxide)奈米管,並探討其光電特性。
In this study, we use the microwave plasma enhanced chemical vapor deposition (MPECVD) system to synthesize the carbon nanotubes, and observe the structures, chemical bonding and the field emission properties of carbon nanotubes. From using clamped substrate can produce self-oriented regular arrays carbon nanotubes without bias-voltage or catalyst pattern.
It is found that oxygen plasma treatment using MPECVD can increase the sp2 bonding which can enhance the abilities of gas adsorption, electronic properties, and field emission. The MWCNTs-based gas sensor for detecting ethanol molecules have been studied , which could detect the ethanol at a ppm-level, and the conductance of the sensors decreases when the sensors are exposed to the ethanol gas at room temperature. Successful utilization of CNTs in gas sensors may open a new window for the development of novel nanostructure gas-devices.
Semiconductive quantum dots (QDs) that exhibit quantum confinement effect have drawn significant attention. ZnO is a typical Ⅱ-Ⅵ semiconductive material with wide band gap, and high photo emission efficiency. In this work, we will synthesize nano2hybrids composites Carbon-Zinc-Oxide (CZO) nanotubes by thermal evaporation and discuss its optoelectronics properties.
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