本研究利用介質屏障放電(dielectric barrier discharge，DBD)進行大氣輝光放電，以六甲基矽氧烷（Hexamethyldisiloxane，HMDSO）為單體，混合氧氣、氫氣、氮氣、氬氣鍍膜。探討單體流量、混合不同氣體所製備之薄膜。並利用傅氏轉換紅外線光譜儀(FT-IR)、化學分析電子儀(ESCA)、接觸角量測系統、橢圓偏光儀(ellipsometer)、原子力顯微鏡(AFM)、紫外光-可見光光譜儀(UV-Vis)及鉛筆硬度測試薄膜特性。

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