研究生: |
鍾秉諭 Chung, Pin-Yu. |
---|---|
論文名稱: |
運用PDCA循環改善翹曲晶片於生產線傳送問題之研究 An Investigation on Transferring Warped Wafers in the Production Line by Applying PDCA Cycle |
指導教授: |
吳建瑋
Wu, Chien-Wei |
口試委員: |
張國浩
CHANG, KUO-HAO 許嘉裕 Hsu, Chia-Yu |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 工業工程與工程管理學系碩士在職專班 Industrial Engineering and Engineering Management |
論文出版年: | 2019 |
畢業學年度: | 107 |
語文別: | 中文 |
論文頁數: | 43 |
中文關鍵詞: | 扇出型晶圓級封裝 、熱膨脹係數 、循環式品質管理 、翹曲晶片 |
外文關鍵詞: | Fan-Out Wafer-Level Packaging(FOWLP), Coefficient of Thermal Expansion(CTE), Plan-Do-Check-Act cycle(PDCA cycle), warpage wafer |
相關次數: | 點閱:2 下載:0 |
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隨著科技日新月異半導體晶片製造更加精密線寬越做越小晶片厚度也越做越薄,摩爾定律(Moore’s Law)也逐漸走到瓶頸,半導體製程(晶圓代工)逼近物理極限,如何維持摩爾定律成為半導體產業面臨的重要的課題,不再侷限在製程微縮而必須往先進封裝的領域發展,先進封裝中的扇出型晶圓級封裝(Fan-Out Wafer-Level Packaging,FOWLP)技術能因應高階堆疊所需的更高輸入輸出(Input/Output, I/O)密度需求,又因不必使用IC基板而能降低封裝厚度的FOWLP技術,在個案公司的持續投入研發與積極推廣之下,已經成功進駐無線通訊裝置、汽車,以及智慧型手機等眾多應用領域,如人工智慧(AI)第五代行動通訊系統(5G)無人自駕車系統等逐漸開花結果,產業發展成長前景看好。
半導體身為科技產品的火車頭,跨入先進封裝的領域必須克服翹曲(warpage)、熱膨脹係數(Coefficient of Thermal Expansion, CTE)等問題,可透過不同的CTE緩解翹曲的狀況,也可以改變基板的材料,如換成矽晶圓(Silicon, Si)當成載具生產,但因本過高而較少廠商投入,製程與設備改善成了業界的發展主軸。
循環式品質管理(Plan-Do-Check-Act,PDCA)是企業界在使用的品質管理工具,透過規劃、執行、查核(驗證)、行動(檢討)四個階段不斷循環的方式,以持續改善並達成目標確保每次都能達成目標。此論文以PDCA循環針對三維積體電路(Three Dimension Integrated Circuit, 3D IC)封裝技術(FOWLP)的翹曲晶片在生產過程中的傳送問題進行改善,透過各專業領域的專家集思廣益、腦力激盪通力合作結合適合的品質改善手法達成品質改善目標。不同行業、相同的循環式品質管理手法改善生產流程、服務品質流程,都能獲得品質改善效益。PDCA 首次應用在生產設備機台改善的品質控制,獲得巨大的利益,值得大力推荐並融入生活。
At the pace with the rapid progress of making precisely semiconductor chips, line width becomes smaller and smaller while chips thickness getting thinner. Also, Moore's Law gradually faces a lot of ordeals. Semiconductor manufacturing process approaches the limit of physics. How to maintain Moore's Law is an important task for the semiconductor industries. They have to go in the direction of the advanced areas of encapsulating no longer limited in the processing of miniature. Among them, one of the most high-profile is FOWLP(Fan-Out Wafer-Level Packaging). Advanced packaging can be based on high-order stack requirements of higher input and output(input/output, I/o) density requirements, and because there is no need to use IC substrate and can reduce the thickness of the package FOWLP technology, in the case company's continued investment in R & amp; d and active promotion, has been successfully stationed in wireless communication devices, automobiles, and a wide range of applications such as smart phones. Besides, artificial intelligence(AI) fifth generation mobile communication system (5G) unmanned self-driving system and other gradually blossom, industrial development and growth prospects are promising.
In the capacity of the highest peak of technology, semiconductor enters advanced areas of encapsulating that they have to overcome warpage, CTE(Coefficient of Thermal Expansion)and so on. Those problems can help relieve the situation of warpage through different kinds of CTE and can also change the ingredients of the substrate. For example, change into silicon and then use as a carrier to produce. However, due to the cost was too high, few companies invest in this project. Therefore, improving equipment and the manufacturing process are the main task of the developing of the semiconductor industry.
PDCA, considered as a tool of quality management that is often used in the business community. Through the circulation of arranging, executing, inspecting, and reviewing, it improves the quality and also achieves the goal every time. In this paper, the PDCA cycle for three-dimensional integrated circuits (three Dimension Integrated Circuit, 3D IC)packaging Technology(FOWLP)warping chip in the production process of the transmission of the problem to improve, through experts in various professional fields to brainstorm, Brainstorming works together to achieve quality improvement goals in combination with appropriate quality improvement techniques. Different industries, the same circular quality management approach to improve the production process, service quality process, can obtain quality improvement benefits. PDCA first application in the production equipment machine that improve the quality control, access to great benefits, worthy of strong recommendation and integrate into life.
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