近年來隨著硬碟機記憶容量的需求愈來愈高，硬碟片的製造技術也顯得愈來愈重要了，尤其是在硬碟片拋光製程部份。有愈好的硬碟片拋光後品質，對於提昇硬碟片之資料儲存量是具有極大助益的，因此要如何有效改善拋光後硬碟片的表面特性，將成為值得研究的首要課題。
在本論文中，將進行玻璃基板硬碟片拋光後表面特性之實驗。實驗中選擇了拋光壓力、上下盤轉速、太陽齒輪轉速、研磨液濃度、拋光墊之硬度種類及其表面溝槽型式作為可控制的拋光參數，並觀察拋光後硬碟片的表面粗糙度、表面波狀度、表面平坦度改善量以及材料移除率，再搭配變異數分析來分析各項拋光參數及其搭配組合對欲觀察項目的影響程度，進而決定著手進行改善拋光後品質的方向。實驗結果顯示藉由拋光參數的調整，可以改善表面粗糙度，表面波狀度以及材料移除率，至於在表面平坦度改善量方面，則拋光之加工步驟所能產生的影響相當有限。

As the requirement for magnetic rigid disk drive’s data recording was getting higher, disk’s manufacturing technique would be more important, especially the polishing process since with the better surface characteristics, it would be helpful for the increase in data recording in the disk substrates. Therefore, how to improve the surface characteristics of disk substrates in polishing process would become an important topic.
In this study, experiments are conducted to reveal effects of polishing parameters including rotational speed, applied pressure, slurry concentration, pad type and its groove type on surface characteristics, including surface roughness, waviness, flatness and removal rate when polishing glass-ceramic based rigid disk. Their effects would be analyzed with analysis of variance (ANOVA) to determine which parameters would have significant effect on surface characteristics, and also provide the directions that could improve disk substrate surface characteristics efficiently in polishing process. Experimental Results show that surface roughness and waviness and removal rate could be improved by adjusting the levels of polishing parameters while it has insignificant effect on surface flatness improvement.

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