以熱裂解化學氣相沈積法在快速升降溫真空系統中，於矽與二氧化矽基板上合成垂直奈米碳管陣列。其中二氧化矽除了有隔絕催化劑與矽基板表面的反應效果外，實驗中也觀察到有均勻的隔絕效果。利用此製程可將碳管陣列的長度成長至釐米的尺寸，也可任意成長出所需花樣的奈米浮雕。實驗中也利用創新的轉印技術，將在矽基板上所成長的碳管陣列轉印於Al2O3基板上，並提升其場發射性質，使其場發射電流甚至可達到325 mA/cm2，而其起始電場只需0.55 V/um。其中也探討場發射位置的結構與附著力對其性質的影響。
利用點對點電極的設計，在外加電場下可成功地成長出跨接式的奈米碳管。改變其多層金屬鍍膜，更可成長出跨接式單壁奈米碳管。而電極區域所成長的面積隨與外加電場的關係，也藉由理論模擬作更進一步的探討。實驗中也比較了以多層膜與共濺鍍法製備試片而成長之單壁奈米碳管間的結構與直徑分佈的差異。另外，利用懸浮觸媒法所合成的單壁奈米碳管絨球，也可在真空腔體中以通入直流電源的方式，製作為奈米碳管燈泡。

By using a rapid heating and cooling system (RHCS), several kinds of carbon nanotubes (CNTs) were synthesized in a thermal chemical vapor deposition (CVD) chamber. The process for grown positioning CNT and the applications of synthesized vertical CNTs array were discussed in this work.

Vertically aligned CNTs were synthesized on a lithographically patterned silicon/silica substrate coated with an ultra thin iron film. The length of CNTs array could be grown up to 500 um and the profile was controlled by the thickness of catalytic film. To improve to field emission properties of CNTs array, a process for transferring CNT array from silicon wafer to alumina substrate coated with Ag-paste was proposed. A current density of 325 mA/cm2 was attained with an applied electric field of 2.4 V/um and the turn-on field was only 0.55 V/um. With this method, the adhesion between CNTs and substrate was enhanced and the current density and turn-on voltage were also improved. Effects of microstructure of the emitting sites at CNT tip on the current density were also studied.

On the process for fabricating directional single-walled carbon nanotubes (SWNTs), an electric field was applied during the CVD process. The electric field affected significantly the CNTs direction during growth on multi-layered substrate. The sharp edge of Cr electrode yielded an enhanced electric field, which promoted the growth of SWNTs between the two tips. A theoretical modeling was proposed to predict the electric field, and the simulated pattern was quite consistent with the SWNT growth region around the tips.

High quality and high purity SWNTs on Fe-Mo catalysts were synthesized by thermal chemical vapor deposition. The catalysts were prepared by using co-sputtering and multilayer pre-coating methods. Morphologies and microstructure of the synthesized SWNTs were examined. Peaks of the radial breathing mode (RBM) in the Raman spectrum demonstrated that highly pure SWNTs had been synthesized when the co-sputtered Fe-Mo catalysts were used. The CNT bulb was also made by the SWNTs filament which was synthesized by the floating catalyst method.

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