摘 要
加速器質譜儀(accelerator mass spectrometry，AMS)微量分析法係將待測樣品製作成離子源，利用加速器使其能量加速至百萬電子伏(MeV)級，再藉由核物理的粒子量測技術，以獲致高質量解析度與低背景干擾的優點。因所需樣品的量極少(約毫克等級)，又深具超高靈敏度(約10-15)與可信度的特性，許多精進的研究課題均須仰賴本分析法，例如長半衰期放射性同位素(鈹-10、碳-14、鋁-26、氯-36、碘-129等)的核種量測與微量穩定同位素的和含量分析等。

本論文的目的在於利用游離腔配合E-ΔE原理自製完成的偵檢器，架構出一個完整的加速器質譜儀系統原型，最後經由蒙地卡羅程式(SRIM)的模擬以及鋂-241阿伐射源實際測試來了解此系統的特性，藉以提供日後系統改良的方向。

實驗結果發現系統已能正常動作且自製的偵檢器特性良好，ΔE偵檢器的能量沉積的標準差在氣壓150–300mbar之間只有0.020–0.039MeV，而且與蒙地卡羅(Monte Carlo)模擬的結果相近。將來應用在加速離子取代射源並減低窗(window)薄膜厚度後，能量沉積的標準差預期將會降的更低。

系統上需要改良的地方包括：改用輸出波形時間常數小於2μs 的前置放大器、改善柵極的製作技術以及修改偵檢器真空腔部分的設計，使其能夠配合厚度小於1μm之窗薄膜的使用。

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