本研究利用仿原子力顯微鏡觀察奈米多孔性陽極氧化鋁薄膜，得到薄膜尺寸相關數據，藉以用來進行有限單元模擬。在模擬過程中，運用有限單元軟體ANSYS，分別進行二維和三維結構模擬分析，探討奈米多孔性薄膜因製程所導致之不同結構對其機械性質的影響。

在二維模型中，本研究所採用的單元為Plane 42，由四個節點所組成，每個節點具有兩個位移自由度。利用有限單元分析方法，在模型的右方給予位移負載0.1奈米，對奈米多孔性結構進行模擬分析。從參數化研究中發現，隨著周期性基本單元的長寬比越高，其楊氏模數下降的幅度越大；此外，陽極氧化鋁薄膜在固定的長寬比下，其蒲松比的大小和孔隙率呈現對應增加的趨勢，而周期性基本單元 (子模型)的長寬比越接近 1時 ，其蒲松比變化越大。

在三維全域模型中，藉由複合材料力學混合理論，計算出 Z 軸方向上之楊氏模數，並利用 ANSYS 進行驗證。此外，本研究在三維全域模型模擬中，另外模擬奈米壓痕實驗，探討壓頭對薄膜材料所施加之負載與壓痕深度之關係，藉此求得奈米壓痕實驗之楊氏模數。模擬奈米壓痕實驗過程，壓頭對薄膜材料所施加之負載與壓痕深度之關係，藉此求得Z軸方向上之楊氏係數並利用奈米壓痕實驗，量測奈米多孔性薄膜之機械性質，以驗證分析結果之可信度並希望藉由模擬結果，得到陽極氧化鋁薄膜不同的孔隙率下，其材料機械性質如楊氏模數和蒲松比，以提供進行相關研究之學者設計上之參考依據。

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