本研究將傳統電解滲氫技術整合於微機電系統，由於薄膜機械性質在結構設計及耐磨耗元件扮演重要角色。若能透過改質方式調變薄膜機械性質，使得單一材料具有多種應用性，降低製程上材料選用的限制。因此本研究提出電解滲氫技術應用於調變薄膜機械性質，提升設計與製造上之性能與良率。此技術屬於低溫製程，同時電化學反應具有製程均勻性佳的優點，在不改變原始結構厚度的前提下，進行表面改質。本研究將首先針對鈦薄膜進行滲氫處理，透過微機電製造技術製作微懸臂樑結構，搭配電流密度與處理時間等滲氫參數，驗證此方法應用在薄膜機械性質調變的可行性，再將此技術應用於CMOS-MEMS上常見的鋁薄膜材料，提升此技術於薄膜改質的應用性。搭配量測儀器架設，定性及定量分析在不同滲氫條件下，機械特性變異量。同時，建立單一種金屬材料於不同滲氫條件下，包含成分分析及殘餘應力、楊氏模數、硬度等機械材料性質參數資料，做為後續應用於元件上之參考。

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