研究生: |
王淨樺 Wang, Ching-Hua |
---|---|
論文名稱: |
新型垂直邏輯製程相容雙極性電晶體及其驅動之電阻式記憶體之研究 The Study of a Novel CMOS-Compatible Vertical Bipolar Junction Transistor and 3D RRAM with 1BJT+1R Structure |
指導教授: |
金雅琴
King, Ya-Chin 林崇榮 Lin, Chrong-Jung |
口試委員: |
金雅琴
King, Ya-Chin 林崇榮 Lin, Chrong-Jung 蔡銘進 |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering |
論文出版年: | 2011 |
畢業學年度: | 99 |
語文別: | 中文 |
論文頁數: | 86 |
中文關鍵詞: | 雙極性電晶體 、電阻式記憶體 |
外文關鍵詞: | BJT, RRAM |
相關次數: | 點閱:2 下載:0 |
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在本論文中,提出完全不需要額外光罩的新型垂直邏輯相容雙極性電晶體,其具有高增益以及可微縮的特性,並成功驗證利用此新型雙極性電晶體驅動之立體垂直電阻式記憶體,可達成記憶體高效與高密度的需求。
垂直雙極性電晶體的形成主要是利用在N-Well(或P-Well)中打Core N-LDD及其P-Pocket(或Core P-LDD及其N-pocket)的摻雜,形成垂直的NPN(或PNP)結構。以NPN雙極性電晶體為例,表層濃度高的Core N-LDD為雙極性電晶體之射極,濃度低且佈植較深的P-Pocket為基極,N-Well為集極。文中主要是關於NPN雙極性電晶體的討論,大致分成將基極P-Pocket接出表面之P+接點與I/O P-LDD接點結構,以及其相關結構變數的探討與應用在電阻式記憶體驅動之陣列佈局。
藉由在新型雙極性電晶體射極之上形成堆疊的電阻性記憶體薄膜TiN/Ti/HfO2/TiN,形成1BJT+1R的立體垂直電阻式記憶體結構。相較於金氧半電晶體當驅動器,藉由高增益的雙極性電晶體驅動,立體垂直電阻式記憶體可以節省面積且降低操作電壓,並具有高效且高密度的特性。
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