中文摘要
本實驗結合原子力顯微術之奈米加工技術以及光學微影技術，製作以單一金奈米線為基礎的電阻式化學感測器，再將其置於自組裝分子溶液後，並設計出一套即時量測系統來偵測電阻值的改變，以及研究其化學吸附在金奈米線上的行為。感測原理是由於自組裝分子會與金奈米線的表面形成化學鍵結，使其電阻值會因導電電子在傳輸過程中與表面的散射效應增加而上升，並以此作為感測依據。本實驗選用十二烷硫醇分子作為感測分子，發現相同厚度的奈米線，在不同濃度下其電阻改變的飽和值相同；而進一步發現不同厚度的奈米線在相同濃度下，其電阻上升的飽和值會隨著厚度減少而增加，目前達到最高的電阻上升飽和值約為10 %。

Abstract
In this work, the fabrication of a resistive-type single Au nanowire chemical sensor based on a combination of atomic force microscopy nanolithography and conventional photo-lithography, and in-situ measurement of the adsorption of alkanethiolate molecules in liquid are reported. The sensing mechanism is demonstrated by the selective binding of a self-assembled dodecanethiol monolayer onto a single Au nanowire connected with Ti electrodes in pure alcohol. When adsorbates are adsorbed onto the surface of an Au nanowire, a resistance increase caused by increased surface scattering can be observed. It is found that the resistance increases of the same nanowire do not change in different concentrations, and the resistance increase is higher as the nanowire becomes thinner. The highest saturation value of a 14-nm thick nanowire is up to 10%.

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