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研究生： 張絢
Chang, Hsun
論文名稱： 基於鋯鈦酸鉛平板之光子晶體波導的模型建立、設計與製作
The Modeling, Design, and Fabrication of Photonic Crystal Waveguides Based on PZT Slab
指導教授： 齊正中
Chi, Cheng-Chung
口試委員:
學位類別： 博士
Doctor
系所名稱： 理學院 - 物理學系
Department of Physics
論文出版年： 2005
畢業學年度： 93
語文別： 英文
論文頁數： 126
中文關鍵詞： 光子晶體 、鋯鈦酸鉛 、模擬 、平板式 、波導 、電子束微影
外文關鍵詞： photonic crystal, PZT, simulation, slab, waveguide, Ebeam Lithography
相關次數： 點閱：2  下載：0 
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    • 鐵電物質薄膜已逐漸應用於積體光電領域，因為相較於一般介電質，這些物質的物理特性可提供更多的應用。近年來，鋯鈦酸鉛（Pb（ZrxTi1-x）O3）已成為光波導元件的熱門材料之一，其壓電性質和電光效應也被廣泛的討論。本論文中，我們研究基於鋯鈦酸鉛平板之光子晶體波導的模型建立、設計，並研究其製作之可行性。

    平板式的光子晶體波導由二維的光子晶體限制光在平面的傳導，復以折射率不同的三明治結構讓光在垂直方向形成全反射，因此可以透過適當的設計，有效的降低光的傳導衰減。本論文目的在設計及製作鋯鈦酸鉛平板之光子晶體波導的Y形分光器，為達到此目的，我們研究範圍包括二維的光子晶體的能帶計算、鋯鈦酸鉛的電光效應，並以此理論計算結果設計光波導元件。之後我們模擬二維與三維光子晶體的光傳導情形，以驗證先前的設計。元件製作方面，我們使用電子束微影系統來定義光子晶體的圖形，並用離子束蝕刻機進行蝕刻製程。我們成功的設計並製作了鋯鈦酸鉛平板之光子晶體波導和Y形分光器。

    There has been considerable interest in developing ferroelectric thin films for integrated optoelectronic devices because these films have some advantageous physical characteristics. In recent years, PZT（Pb（ZrxTi1-x）O3）has been an interesting material for optical waveguide devices due to its excellent functional properties, such as piezoelectricity, pyroelectricity, and EO effects.

    In this thesis, we studied the modeling, design and fabrication feasibility of PZT slab photonic crystal optical waveguides, which incorporated 2-D photonic crystal geometries for lateral confinement of light and total internal reflection for vertical confinement. The propagation loss could be substantially reduced for properly designed photonic crystal waveguides. We designed and fabricated Y-branch Beam-splitter. Towards this goal, we did the band structure calculations of various 2D photonic crystals and studied the EO effect of PZT. The results of the band structure were used as a guide for proper waveguide designs. Then we did 2-D and 3-D photonic crystal waveguides simulation to verify the design. We used Ebeam lithography to define the photonic crystal patterns and ion beam etcher for the etching process. The PZT photonic crystal waveguides and Y-branch Beam-splitter were successfully designed and fabrication.

    Chapter I Introduction 1.1 Photonic Crystal 1 1.1.1 2D Photonic Crystal 1 1.1.2 Defect in 2D Photonic Crystal 2 1.1.3 Photonic Crystal Slab 2 1.2 Optical Properties of PZT 3 1.3 Experiment 3 1.4 Brief Statement of Thesis 4 Chapter II Band Structure of 2D Photonic Crystal 2.1 Electromagnetic Waves Propagating in Periodic Structure Dielectric Material 5 2.1.1 H-polarization 6 2.1.2 E-polarization 7 2.2 Three 2-D Structures 10 2.2.1 Square Lattice 10 2.2.2 Triangular Lattice 14 2.2.3 Honeycomb Lattice 18 2.3 Convergence 21 2.4 Band Structure of Our Sample 23 Chapter III PZT 3.1 EO Effect 24 3.2 Theory of Measuring EO Effect 27 3.3 Information of Sample 28 3.4 Measurement of EO Effect 29 Chapter IV Modeling and Simulation 4.1 Theory 31 4.1.1 The Finite-Difference Time-Domain (FDTD) Method 31 4.1.2 Absorbing Boundary Conditions 31 4.1.3 The Software 31 4.2 Simulation of 2D Photonic Crystal 32 4.2.1 Propagation in 2D Photonic Crystal 32 A. Rod Photonic Crystal Structure 32 B. Hole Photonic Crystal Structure 35 4.2.2 Propagation Dependence on Width of Band Gap 40 (Rod Photonic Crystal Structure) 4.2.3 Propagation in Different Line Defects of Square Lattice 43 A. Rod Photonic Crystal Structure 43 B. Hole Photonic Crystal Structure 58 4.2.4 Different Line Defects of Triangular Lattice 72 A. Rod Photonic Crystal Structure 72 B. Hole Photonic Crystal Structure 75 4.2.5 Using Modified Wavelength to Help Propagation through The Bent 79 (Hole Photonic Crystal Structure) 4.2.6 Using Specific Defect to Help Propagation 87 (Hole Photonic Crystal Structure) 4.3 Thickness of Slab Photonic Crystal Waveguides 90 4.3.1 Propagation Properties Dependence of Thickness 90 4.3.2 Simulation And Results 90 Chapter V Design and Fabrication 5.1 Design of Device 93 5.2 Steps of Fabrication 96 5.3 PMMA Coating 97 5.3.1 Double-layer PMMA 97 5.3.2 Spin-Coating 97 5.4 Ebeam Lithography 98 5.4.1 GDSII Files 98 5.4.2 Exposures 103 5.4.3 Tuning Focusing / Aligning Using Single Scan 106 5.5 Ion Beam Etching 107 5.5.1 Etching of PZT 107 5.5.2 Equipment of Ion Beam Etching 108 5.5.3 Experiment and Results of Ion Beam Etching 111 5.6 Device Testing 113 Chapter VI Conclusion 115

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