本論文目的是利用奈米壓印製作一高感測度之感測電極晶片，並配合電
容式感測電路以實現具備即時監測、定量之低成本多巴胺(dopamine)感測晶
片。因為要達到高感測度需要將指叉狀電極(Interdigital Array
Electrodes ,IDA Electrdes)之間的間距縮小，為了將電極之製作成本降低
並減少製作時間，所以我們採用奈米壓印(Nanoimprint Lithography,NIL)技
術來製作奈米等級間距的電極， 並使用電化學氧化還原法(Oxidation
Reduction)來感測多巴胺。
為了電極間的絕緣，我們將電極製作在經電漿輔助化學氣相沉積(PECVD)
氮化矽之矽基板上，經由奈米壓印、氧氣電漿(O2 Plasma)蝕刻、鉻/金熱蒸鍍
(Evaporator)、Lift-off、黃光等步驟完成電極製作後，不同濃度之多巴胺
便可經由此電極晶片因電化學氧化還原產生不同之訊號電流，由儀器觀察電
流後便可由電流得到所量測之多巴胺濃度。最後在配合一互補式金屬氧化半
導體(Complementary Metal Oxide Semiconductor , CMOS)電路放大電流並
對電容充放電轉換成電壓訊號，在同樣充電時間下因不同電流得到不同電壓
訊號，藉此判讀多巴胺濃度。
藉由奈米壓印技術，我們得到一電極間距300 nm 的指叉狀電極，此電極
之感測度在多巴胺濃度0.5 μM 下，可產生1.26nA 訊號電流，配合放大電路，
理論上的多巴胺感測濃度最低可以到0.1μM
關鍵字：奈米壓印、多巴胺、氧化還原法、帕金森氏症、指叉電極。

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