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研究生: 米忻超
論文名稱: 動態系統暨多產品混合生產製程之多變量批次控制器研究
A Study of Multivariate Run-to-Run Controllers for Dynamic and Mixed-Run Manufacturing Processes
指導教授: 曾勝滄
口試委員: 曾勝滄
李水彬
洪志真
黃榮臣
楊素芬
鄭順林
學位類別: 博士
Doctor
系所名稱: 理學院 - 統計學研究所
Institute of Statistics
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 110
中文關鍵詞: 批次控制多投入多產出動態系統多產品混合生產製程指數加權移動平均控制器quasi MMSE控制器threaded MEWMA控制器
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  • 既有文獻之批次回饋控制方法,大多在生產製程之投入-產出(input-output, 簡稱I-O)模型為靜態(static)模型且單一生產線僅生產單一產品的假設下被提出,然而,由於投入變數與產出變數之間通常存在更為複雜的遷移效應(carry-over effect),故實際生產製程的I-O模型應被視為動態(dynamic)模型。除此之外,生產線上亦經常採取多樣產品混合(mixed-run)之生產模式,此時,若採用傳統的批次回饋控制方法對製程加以調控,即使能夠得到製程產出收斂的結果,卻可能因為製程變異增加,導致良率下降、成本上升。
    本論文在multiple-input and multiple-output(MIMO)系統下,針對階數為 的轉換函數模型,建構quasi minimum mean square error(qMMSE)控制器以調控動態生產製程,並完整探討其製程穩定條件及控制績效等理論性質。由穩定條件研究之結果可知,此控制器在動態製程之干擾項為非平穩型向量時間序列且其各維度之非平穩階數小於2時,皆可藉由適當的參數設定使其滿足穩定條件;由控制績效研究之結果可知,若在動態製程下利用exponentially weighted moving average(EWMA)控制器對製程進行調控,則遷移效應將嚴重影響其控制績效,若使用qMMSE控制器便能夠有效地克服EWMA控制器於此製程下控制績效不彰之缺點。除此之外,控制績效之研究亦在本論文中被應用於最適控制器之研究,此成果可作為實際應用時控制器設定之參考。
    在多樣產品混合之生產模式下,針對更為複雜且貼近半導體實務的MIMO系統,本論文以threaded multivariate EWMA(thMEWMA)控制器對製程進行調控。相較於SISO系統下之既有文獻僅在特定製程干擾分配之假設下探究其製程穩定條件,本論文以更一般化的向量時間序列模型作為其製程干擾之分配,放寬其製程穩定條件研究之限制,並提出理論結果證實thMEWMA控制器能夠在更多不同的製程干擾假設下滿足穩定條件。除此之外,由模擬結果顯示thMEWMA控制器之控制績效與生產過程中各產品之連續生產期數及間隔生產期數相關,故本論文進一步推導出thMEWMA控制器績效之理論結果,並根據此結果求出最適控制器,以提供實務應用上之依據。


    目錄 I 摘要 II Abstract IV 第一章 緒論 1 1.1 前言 1 1.2 批次製程控制 2 1.3 批次製程控制之重要研究主題 4 1.4 研究目的與論文架構 5 第二章 文獻回顧 7 2.1 前言 7 2.2 動態製程之批次回饋控制問題 10 2.3 多產品混合生產模式之批次回饋控制問題 16 第三章 動態製程之批次回饋控制設計與研究 19 3.1 前言 19 3.2 多變量qMMSE控制器 20 3.3 製程穩定條件研究 22 3.4 績效分析 28 3.5 實例分析 48 3.5.1 參數估計誤差情況下之穩健分析 51 3.5.2 模型誤判情況下之穩健分析 57 3.6 結論 61 附錄 67 第四章 多產品混合生產模式之批次回饋控制設計與研究 75 4.1 前言 75 4.2 多變量thMEWMA控制器 76 4.3 製程穩定條件研究 77 4.4 績效分析 80 4.5 結論 95 附錄 96 第五章 結論與後續研究 101 參考文獻 104

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