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研究生: 賴一鳴
Yi-Ming Lai
論文名稱: 以離軸濺鍍的方式來研究45度同質雙磊晶高溫超導約瑟芬結
Study of the Homo-Biepitaxial YBCO grain boundary junction by using the off-axis RF sputtering
指導教授: 齊正中
Cheng-Chung Chi
口試委員:
學位類別: 碩士
Master
系所名稱: 理學院 - 物理學系
Department of Physics
論文出版年: 2006
畢業學年度: 94
語文別: 英文
論文頁數: 54
中文關鍵詞: 釔鋇銅氧濺鍍約瑟芬結高溫超導
外文關鍵詞: YBCO, sputtering, grain boundary junction
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  • 我們使用離濺鍍法在YSZ[100]基板上成長YBCO高溫超導薄膜,並成功的在不同鍍膜溫度下得到相對於YSZ[100]軸兩種不同轉向的YBCO薄膜,分別為在825℃成長的YBCO[100]//YSZ[100] (0度) 薄膜及在670℃成長的YBCO[110]//YSZ[100] (45度) 薄膜,我們所得到的YBCO薄膜其臨界溫度約在86K~88K,而其臨界電流密度在5K時為9×10^6~1.14×10^7 A/cm2。
    運用此兩種不同轉向的YBCO薄膜,我們可以來製做高溫超導約瑟芬結,首先,先在825℃成長一層約50 nm厚的YBCO緩衝層,隨即用離子蝕刻把一半的YBCO緩衝層蝕刻掉,接下來在670℃成長約150 nm厚的YBCO薄膜;成長在緩衝層上頭的YBCO薄膜可維持與緩衝層一樣的轉向 (0度),而成長在被離子蝕刻過的基板上的YBCO薄膜則為 45度轉向。我們最後得到的45度約瑟芬結其臨界電流密度在4.2K時為10^3~10^4 A/cm^2,而其臨界電流與外加磁場的關係為非正常的Fraunhofer-pattern。


    By using the off-axis RF magnetron sputtering method, we have fabricated YBCO thin films on YSZ [100] substrates with two distinct in-plane orientations, namely, YBCO [100] // YSZ [100] (0^0 in-plane orientation) at 825^0C and YBCO [110] // YSZ [100] (45^0 in-plane orientation) at 670^0C. Both thin films have critical temperatures T_{C0} in the range of 86~88K and critical current densities at 5K in the range of 9 X 10^6 A/cm^2 ~ 1.2 X 10^7 A/cm^2. To fabricate the 45^0 grain boundary junctions, we first deposit a thin YBCO [100] film at 825^0C on the substrate and remove part of the film by ion-milling. Then a thicker YBCO film is deposited at 670^0C. We show that the film
    deposited on the ion-bombarded substrate can maintain its 45^0 in-plane orientation while the film deposited on the YBCO [100] film keeps the 0^0 in-plane orientation. The critical currents densities of our 45^0 grain boundary are in the range of 10^3~10^4 A/cm^2 at 5K and the modulation curves are anomalous Fraunhofer patterns because of the inhomogeneous critical current densities result from the faceting effect and the d_{x^2-y^2} symmetry of the order parameter.

    1 Introduction 1 1.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.2 Motivation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 2 Experiment and Measurement 6 2.1 Introduction to the Sputtering System . . . . . . . . . . . . . . . . . . . . . 6 2.2 Thin Film Fabrication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2.3 Thin Film Characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 3 Thin Film Characteristics 11 3.1 Electrical and Structure Properties . . . . . . . . . . . . . . . . . . . . . . . 11 3.1.1 X-Ray and RT measurement . . . . . . . . . . . . . . . . . . . . . . . 11 3.1.2 Surface Morphology . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17 3.2 In-Plane Orientation Between YBCO and YSZ . . . . . . . . . . . . . . . . . 18 3.2.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 3.2.2 Experiment Result . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 3.2.3 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 3.3 Magnetic and Transport Properties . . . . . . . . . . . . . . . . . . . . . . . 25 4 The 450 grain boundary junction 29 4.1 Introduction to Josephson Phenomenon . . . . . . . . . . . . . . . . . . . . . 29 4.2 Junction Fabrication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 4.3 Experiment Result . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 4.3.1 Structural Properties and R-T Curves . . . . . . . . . . . . . . . . . 40 4.3.2 Current-Voltage curves . . . . . . . . . . . . . . . . . . . . . . . . . . 41 4.3.3 Josephson Junction in Magnetic Field . . . . . . . . . . . . . . . . . . 41 4.3.4 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46 5 Conclusion and Future Work 51

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