六維運動量測裝置(Six-DOFs Motion Measurement Device ,MMD)是利用史都華平行連桿機構建立的量測裝置，將可伸縮雙球量測桿作為史都華平台的連桿，透過可伸縮雙球量測桿上之光學尺量測連桿長度，並從六支連桿長度計算出MMD上下板之間六維運動關係。

本論文研究六維運動量測裝置中可伸縮雙球量測桿產生熱誤差之原因與影響，並研究可伸縮雙球量測桿之熱誤差補償方法，最後以模擬驗證桿長熱誤差補償模型對六維運動量測裝置的精度改善效果。

本研究是以熱電偶溫度量測器、光學非接觸式位移感測器，紀錄已知長度可伸縮雙球量測桿之熱變形量與室溫變化，搭配以自我迴歸法建構可伸縮雙球量測桿在已知長度下之熱誤差模型。建立不同量測長度之熱誤差模型後，使用線性內插得到可伸縮量測桿任意長度下之熱誤差。本研究中研發之可伸縮雙球量測桿熱誤差模型可以有效降低量測桿熱誤差，當溫度變化在每小時4℃內，可將熱誤差量從4μm降到0.35μm，改善量測精度約90%。當溫度變化在每小時4℃內，MMD熱誤差量從4.8μm降到0.029μm，改善量測精度約99.4%。

The Six-Degree-of-Freedom Motion Measurement Device is based on Stewart platform(SP) with parallel kinematic mechanism. Extensible bar of the SP is replaced by the telescopic double ball bar. The telescopic double ball bar is equipped the optical encoder to measure its length. Based on the six lengths of the telescopic double ball bar, the MMD can calculate the six DOFs motion from between the upper and lower plates.

One of the main topics of this thesis is source and effects of thermal error in the telescopic double ball bar. The second topic is modeling of the thermal error and the compensation method for thermal error. Finally, simulation is conducted to verify the effectiveness of thermal error compensation method and the accuracy of the MMD.

The research use thermocouple and optical encoder to record the temperature and thermal error of the telescopic double ball bar at known length. With ARX method and measured data, the thermal error model can be modeled. After the thermal models of different length are built, linear interpolation is used to approximate thermal error between measuring length of thermal error model. By linear interpolation, the thermal error of the telescopic double ball bar can be estimated at any measuring length. This thesis’s compensation method can reduce the thermal error of telescopic double ball bar from 4μm to 0.35μm within 4℃ difference of temperature in an hour. This thesis’s compensation method can reduce the thermal error of MMD from 4.8μm to 0.029μm within 4℃ difference of temperature in an hour

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