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研究生: 簡歆蕙
Jian, Xin-Hui
論文名稱: 彈性複合結構三維成型技術的開發與靜電裝置整合的應用
Development of 3D Manufacturing Technology for Flexible Composite Structures and Its Application with Integrated Electrostatic Devices
指導教授: 蘇育全
Su, Yu-Chuan
口試委員: 陳紹文
Chen, Shao-Wen
陳宗麟
Chen, Tsung-Lin
學位類別: 碩士
Master
系所名稱: 原子科學院 - 工程與系統科學系
Department of Engineering and System Science
論文出版年: 2025
畢業學年度: 113
語文別: 中文
論文頁數: 106
中文關鍵詞: 觸覺回饋三維光固化成型靜電驅動微型致動器氣動閥門
外文關鍵詞: Haptic feedback, 3D stereolithography or 3D optical curing molding, Electrostatic actuation, Microactuator, Pneumatic valve
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  • 隨著虛擬實境和擴增實境技術的快速發展,觸覺回饋技術在提升使用者體驗方面扮演著越來越重要的角色。本研究旨在開發一種基於三維光固化成型技術的微型觸覺致動器,利用靜電力控制氣動閥門的開關,實現低功耗、高性能的觸覺回饋輸出。
    本研究設計出一款以氣壓為工作流體的微形單點觸覺致動器,且配合本實驗室高度成熟的三維光固化列印技術,可製作不同機械特性的結構並加以結合,形成含有彈性複合結構之觸覺制動器。首先探討了不同材料配方和製程參數對微型觸覺致動器性能的影響。實驗結果顯示,透過調整光固化樹脂的成分比例和固化條件,可以精確控制致動器的機械性能,使其滿足設計需求。此外論文還深入研究了不同流阻結構的設計,分析其對氣動閥門開關效率的影響。透過引入降壓彈簧和加速彈簧等機制,可以有效降低閥門的操作電壓和遲滯效應,提升觸覺回饋的反應速度和精確度。
    本論文中展示的微形單點觸覺致動器體積大小在 450mm3 以內,直徑 2 mm 的彈性薄膜在 10 kPa 的氣壓作用下,使凸起高度達到 12 mm,未使用降壓彈簧時,操作電壓高達815V,加入降壓彈簧後,操作電壓降為231 V;未使用加速彈簧時,切換時間一個週期約為7秒,加入加速彈簧後切換時間一個週期縮短為 1.2秒。這些成果不僅提供了一種低成本、高效率的微型觸覺致動器製造方法,也為未來觸覺回饋技術的發展提供了新的思路和方向。


    With the rapid advancement of virtual reality (VR) and augmented reality (AR) technologies, haptic feedback technology has played an increasingly crucial role in enhancing user experience. This study aims to develop a micro-haptic actuator based on three-dimensional (3D) photocuring technology that utilizes electrostatic force to control the switching of pneumatic valves, achieving low power consumption and high-performance haptic feedback output.
    This research has designed a micro-single-point haptic actuator that uses air pressure as the working fluid. Combined with the highly mature 3D photocuring printing technology of our laboratory, we can fabricate structures with different mechanical properties and combine them to form a haptic actuator with an elastic composite structure. First, the impact of different material formulations and process parameters on the performance of the micro-haptic actuator was investigated. The experimental results show that by adjusting the component ratio of the photocuring resin and the curing conditions, the mechanical properties of the actuator can be precisely controlled to meet design requirements. In addition, the paper also delves into the design of different flow resistance structures and analyzes their impact on the efficiency of the pneumatic valve switching. By introducing mechanisms such as a pressure-reducing spring and an acceleration spring, the operating voltage and hysteresis effect of the valve can be effectively reduced, improving the response speed and accuracy of haptic feedback.
    The micro-single-point haptic actuator presented in this thesis has a volume size within 450 mm3. The 2 mm diameter elastic diaphragm achieves a protrusion height of 12 mm under 10 kPa air pressure. The operating voltage is as high as 815 V without the use of a pressure-reducing spring, but it drops to 231 V when the pressure-reducing spring is added. Without the use of an acceleration spring, the switching time for one cycle is about 7 seconds, but with the addition of an acceleration spring, the switching time for one cycle is shortened to 1.2 seconds. These results not only provide a low-cost and high-efficiency manufacturing method for micro-haptic actuators but also offer new ideas and directions for the future development of haptic feedback technology.

    摘要 i ABSTRACT ii 致謝 iv 目錄 v 表目錄 ix 圖目錄 xi 1 第一章、緒論 1 1.1 前言 1 1.2 3D列印技術之種類及工作原理 2 1.3 光固化三維列印技術 3 1.4 軟性穿戴裝置 4 1.5 觸覺回饋裝置 5 1.6 研究動機 6 2 第二章、文獻回顧 7 2.1 驅動方式 7 2.1.1 壓式 8 2.1.2 油壓式 10 2.1.3 靜電式 12 2.2 高分子彈性體聚合物 14 2.2.1 單體(monomer) 15 2.2.2 交聯劑(Cross-linking agent) 16 2.2.3 光起始劑(photo-initiator) 18 2.2.4 光吸收劑(Photo-absorber) 19 2.3 PDMS / Ecoflex 複合材料 20 2.4 介電常數簡介 22 2.5 串聯電容量測 23 3 第三章、工作原理與裝置設計 25 3.1 材料分析 25 3.1.1 光固化高分子材料 25 3.1.2 多孔高分子材料介紹 32 3.1.3 PTFE過濾膜 36 3.1.4 高介電常數薄膜 36 3.1.5 潤滑劑 37 3.1.6 導電材料 38 3.1.7 清潔材料 38 3.2 實驗室機台介紹 39 3.2.1 DLP機台介紹 39 3.2.2 DLP製造流程 41 3.2.3 LCD機台介紹 42 3.2.4 LCD製造流程 43 3.2.5 元件後處理工具 44 3.2.6 拉伸測試機台介紹 46 3.2.7 直流高壓放大器 46 3.2.8 其他實驗設備與儀器 47 3.3 靜電式氣壓開關致動器之原理與設計 48 3.3.1 觸覺致動器設計 49 3.3.2 加入降壓彈簧之設計 50 3.3.3 高壓氣體流阻結構設計 52 3.3.4 加入加速彈簧之設計 56 3.3.5 觸覺回饋輸出層介紹 57 3.3.6 致動器加入油膜之原理 58 3.4 微型觸覺致動器裝置製程 59 3.4.1 致動器本體與加速彈簧 61 3.4.2 活動電極 68 3.4.3 支架及彈簧 69 4 第四章、研究結果與討論 71 4.1 流阻出口壓力比較 71 4.2 彈性體凸起高度與壓力之關係 73 4.3 活動電極薄膜量測 75 4.4 加電壓測量方式 76 4.5 固定電壓-氣壓之遲滯效應關係 77 4.5.1 多流道流阻TPU與PI無彈簧比較 78 4.5.2 濾紙流阻TPU與PI無彈簧比較 81 4.5.3 TPU與PI加入降壓彈簧比較 84 4.6 固定氣壓-電壓之遲滯效應關係 88 4.6.1 多流道流阻與濾紙流阻無彈簧比較 89 4.6.2 濾紙流阻加入降壓彈簧測試 91 4.7 加速彈簧測試 93 4.7.1 縮小遲滯效應分析 96 4.7.2 靜電氣壓開關致動器切換時間 98 5 第五章、結論 99 5.1 微型觸覺致動器製造 99 5.2 不同彈簧對電壓、氣壓之關係 100 6 第六章、未來工作 102 7 參考資料 104

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