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研究生: 董佑慈
Tung, Yu-Tzu
論文名稱: 液體表面構組光學元件之量測分析
Analysis and Measurement of Optical Devices Based on Liquid Interface
指導教授: 王培仁
口試委員: 王培仁
陳政寰
許巍耀
學位類別: 碩士
Master
系所名稱: 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 69
中文關鍵詞: 自由曲面液態透鏡夏克.哈特曼波前量測儀澤尼克多項式
外文關鍵詞: Free Surface, Liquid Lens, Shack-Hartmann Sensors
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  • 摘要
    隨著科技的進步以及光電產業的迅速發展,各類型的光學產品,如數位相機、數位手機或是微型投影機等等,皆往輕薄,微小化的趨勢邁進,為了在此類精密光學中以不影響成像品質的條件下減輕重量和減少體積,遂發展出液態透鏡技術來提供變焦功能極為重要,為了使液態透鏡的技術發展完整,加速商業化的應用,如何快速、簡易、及低成本的檢測其系統,故而新檢測技術成為業界發展的重要關鍵。
    在以往的非接觸式量測技術中,常使用干涉儀做為檢測的平台,但干涉儀需要較多的光學元件來提高量測品質,導致儀器整體的體積較大並且價格較昂貴,並且干涉儀在量測時易受震動及空氣擾動等環境影響,故本論文中採用夏克.哈特曼(Shack-Hartmann)波前量測儀來量測液態透鏡的自由曲面,因夏克.哈特曼波前量測儀是利用光點強度和位置的不同來判別不同的波前,故較不需要精密且複雜的光學元件,即可達到高精確度;而在波前還原的步驟中使用澤尼克多項式(Zernike Polynomials)由計算出不同的像差係數重建波前,得知待測物的光學特性,並配合光學分析軟體的模擬此量測系統與實驗數據做比較。

    關鍵詞:自由曲面、液態透鏡、夏克.哈特曼波前量測儀、澤尼克多項式


    ABSTRACT
    With the fast advancement in technology and progress in optoelectronics industry, various optical products, such as digital cameras, cellphones and micro projectors, are following the trends of compactness and miniaturization. For the purposes of volume and weight reduction without sacrificing image qualities, liquid lens technology has been developed for achieving the important variable focus function. To further perfecting the liquid lens technology and expediting the commercial applications, new metrological technology for fast, simple and low cost inspection has become the most critical development in the industry.
    In the traditional non-contact metrological technology, measurement platform based upon interferometry is commonly adopted. However, the system needs more precision optical components for maintaining the measurement quality so that bulky and less cost effective instruments are necessary. Furthermore, interferometer is very sensitive to vibrations and air turbulences in environment. Therefore, the free form interfaces in liquid lens has been measured with the help of Shack-Hartmann wavefront sensors in this thesis. Since the wavefront has been measured via the positional difference of focal point of Shack-Hartmann sensors, less precision and complicated optical components have been necessary for high accuracy in the measurements. In the restoration of wavefront data, Zernike Polyminomials have been adopted for calculation of the phase of light in terms of aberration coefficients. The optical characteristics of the liquid lens under test have been obtained for comparisons between the simulation results from optics analysis and experimental data.
    Keywords: Free Surface, Liquid Lens, Shack-Hartmann Sensors

    摘要 I ABSTRACT II 誌謝 III 目錄 IV 圖目錄 VIII 表目錄 XI 第一章 緒論 1 1-1 研究背景 1 1-2 研究目的 2 1-3 文獻回顧 2 1-3-1 夏克.哈特曼波前量測儀量歷史 2 1-3-2 液態透鏡發展 4 2 第二章 理論介紹 8 2-1基礎光學原理 8 2-1-1惠更斯-菲涅爾原理 8 2-1-2費馬原理 8 2-1-3反射、折射定律 9 2-2 像差理論 10 2-2-1球差 11 2-2-2慧差 11 2-2-3像散 11 2-2-4場曲 12 2-2-5畸變 12 2-3 波前表示法 12 2-3-1波前座標表示法 13 2-3-2澤尼克多項式 13 2-4夏克.哈特曼波前量測儀原理 15 3 第三章 光學量測系統設計 29 3-1 設計方向 29 3-2 量測穿透式光學設計架構 29 3-2-1光源 29 3-2-2待測物 30 3-2-3縮放系統 30 3-2-4波前感測器 30 3-3 光學量測系統模擬設計 30 3-3-1 液態透鏡模擬 30 3-3-2 波前感測器模擬 31 3-3-3 整體光學量測系統設計 31 4 第四章 量測實驗與結果 42 4-1 實驗設備 42 4-1-1 硬體設備 42 4-1-2 軟體設備 43 4-2 光學量測校正 43 4-2-1 光源校正 43 4-2-2 透鏡校正 44 4-2-3 空間濾波器校正 44 4-3 量測系統實驗與量測方法 45 4-3-1 垂直式光學量測系統架設 45 4-3-2 液態透鏡穩態量測 46 4-3-3 液態透鏡暫態量測 46 4-4 液態透鏡穩態量測實驗結果 47 4-4-1 加上15V驅動電壓穩態量測結果 47 4-4-2 加上20V驅動電壓穩態量測結果 47 4-5 液態透鏡暫態量測實驗結果 48 4-5-1 失焦 (Defocus) 48 4-5-2 X方向像散 (X-Astigmatism) 48 4-5-3 Y方向像散 (Y-astigmatism) 49 4-5-4 X方向彗差 (X-Coma) 49 4-5-5 Y方向彗差 (Y-Coma) 49 4-5-6 X方向三葉草 (X-Trifoil) 49 4-5-7 Y方向三葉草 (Y-Trifoil) 49 4-5-8 球差 (Spherical Aberration) 50 5 第五章 結論與未來工作 66 5-1實驗結果與討論 66 5-2未來工作 67 6 第六章 參考文獻 68

    參考文獻
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