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研究生: 盧昀鈺
Lu, Yun-Yu
論文名稱: 以拉曼光譜直接量測懸空單壁奈米碳管電子-聲子耦合之研究
Direct Measurement of Electron-Phonon Coupling in Suspended Single-Walled Carbon Nanotubes by Raman Spectroscopy
指導教授: 柳克強
Leou, Keh-Chyang
蔡春鴻
Tsai, Chuen-Horng
口試委員:
學位類別: 碩士
Master
系所名稱: 原子科學院 - 工程與系統科學系
Department of Engineering and System Science
論文出版年: 2009
畢業學年度: 97
語文別: 中文
論文頁數: 97
中文關鍵詞: 奈米碳管拉曼光譜焦耳加熱效應
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  • 奈米碳管為準一維結構,其載子傳輸具有彈道傳輸(Ballistic Transport)的特性。然而,金屬性奈米碳管在高偏壓下,其電流-電壓特性曲線呈非線性關係,原因在於此時電流的焦耳加熱(Joule Heating)效應使得奈米碳管升溫,電阻因而改變。本研究藉由分析奈米碳管在不同電壓下的拉曼特徵譜線,了解其溫度變化的情形。
    在拉曼光譜的量測中,首先為排除雷射可能會改變奈米碳管的溫度,進而影響焦耳加熱實驗,因此改變雷射光的功率來檢測雷射加熱效應對奈米碳管的影響程度。由檢測結果可知,雷射光的加熱效應,對於奈米碳管的G-band之拉曼位移,其影響的位移量在1 cm-1以下,表示雷射對於焦耳加熱實驗之影響可忽略。
    在研究焦耳加熱效應的實驗中,分別以置於基板上之單根單壁奈米碳管元件和懸空式單壁奈米碳管元件為研究對象。置於基板上之單根單壁奈米碳管元件的製作方式為在基板上先鍍上電極(材料為鈦與鉑),接著在電極上鍍催化劑(二氧化矽/鎳/二氧化矽),最後以熱裂解化學氣相沉積法(Thermal Chemical Vapor Deposition, Thermal CVD)合成單壁奈米碳管。而懸空式單壁奈米碳管元件,先蝕刻基板以製作溝槽結構,其後製作流程與置於基板上之單根單壁奈米碳管元件相同。此製作方式的好處在於能有效定位奈米碳管。
    接著分別對置於基板上之單根單壁奈米碳管元件、懸空式單根單壁奈米碳管元件施加電壓,並臨場量測拉曼光譜,發現置於基板之奈米碳管的G-band之拉曼位移幾乎無任何變化。原因在於G-band的紅移來自於碳管在高溫時,碳-碳(C-C)鍵長增加所導致,而基板的存在將抑制此一現象。而懸空式奈米碳管的G-band之拉曼位移有大幅紅移(拉曼位移向低波數位移)的現象,在1.1 □W的電功率下約有15 cm-1的位移量,在相同的位移量下,小於文獻所發表的電功率。
    雖在懸空式奈米碳管元件中,觀測到拉曼位移有紅移的現象,但碳管與基板間電位差所產生之靜電力,可能造成碳管形變,碳-碳鍵因而拉長,造成紅移的原因可能來自於溫度與形變。因此,在外加一閘極電壓的情況下,臨場量測奈米碳管的拉曼譜線,發現此一靜電力對於G-band並無明顯的影響,故懸空式奈米碳管在焦耳加熱的實驗中,可排除形變的影響。


    摘要 i 誌謝 iii 目錄 vii 圖目錄 x 表目錄 xiv 第一章 緒論 1 第二章 奈米碳管的基本特性 4 2-1 奈米碳管的幾何結構 4 2-2 奈米碳管的電子能譜 7 2-3 奈米碳管的拉曼特徵譜線 10 2-3-1 拉曼散射 10 2-3-2 奈米碳管的拉曼特徵譜線 11 2-3-2-1 徑向呼吸模式(Radial Breathing Mode, RBM) 11 2-3-2-2 G-band 13 2-3-2-3 D-band 14 第三章 文獻回顧 15 3-1 奈米碳管之電性量測 15 3-1-1 低偏壓下之電流-電壓特性 15 3-1-2 高偏壓下之電流-電壓特性 16 3-1-2-1 置於基板上的奈米碳管 16 3-1-2-2 懸空式金屬性單壁奈米碳管 18 3-2 溫度效應對於拉曼譜線的影響 20 3-3奈米碳管在外加電壓下臨場量測拉曼光譜 21 3-4 結論 24 第四章 研究方法與實驗儀器 25 4-1 研究動機 25 4-2 研究方法 26 4-3 實驗流程圖 27 4-4 元件製作流程 28 4-5 實驗儀器簡介 30 4-5-1 微拉曼光譜儀(□-Raman Microscopy) 30 4-5-2 原子力顯微鏡(Atomic Force Microscopy, AFM) 31 第五章 實驗結果與討論 33 5-1 雷射加熱效應檢測 33 5-2 置於基板上之單根單壁奈米碳管元件 34 5-2-1 試片製備 34 5-2-2 實驗參數 37 5-2-3 實驗討論 39 5-3 懸空式單壁奈米碳管元件 39 5-3-1 試片製備 39 5-3-2 實驗參數 40 5-3-3 實驗討論 43 5-4 奈米碳管形變效應檢測 47 5-4-1 試片製備 47 5-4-2 實驗參數 48 5-2-3 實驗討論 49 第六章 結論與未來展望 50 6-1 結論 50 6-2 未來展望 51 參考文獻 53 附錄A 拉曼光譜擬合分析流程 56 附錄B 拉曼光譜擬合結果與分析數據 64 B-1雷射加熱效應檢測 64 B-3 懸空式單壁奈米碳管元件 75 B-4 奈米碳管形變效應檢測 77 附錄C 其他相關實驗 78 C-1 網絡式單壁奈米碳管 78 C-1-1 試片製備 78 C-1-2 實驗參數 78 C-1-3 拉曼光譜擬合分析 79 C-2 置於矽基板上的單壁奈米碳管 80 C-2-1 試片製備 80 C-2-2 實驗參數 81 C-2-3 拉曼光譜擬合分析 82 C-2-4 實驗參數 83 C-2-5 拉曼光譜擬合分析 84 C-2-6 試片製備 84 C-2-7 實驗參數 85 C-2-8 拉曼光譜擬合分析 86 C-3 懸空式單壁奈米碳管 87 C-3-1 試片製備 87 C-3-2 實驗參數 88 C-3-2 拉曼光譜擬合分析 89 C-4 靜電力對於懸空式奈米碳管之形變效應實驗 90 C-4-1 試片製備 90 C-4-2 實驗參數 91 C-4-3 拉曼光譜擬合分析 92 C-4-4 試片製備 94 C-4-5 實驗參數 94 C-4-6 拉曼光譜擬合分析 96

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