摘要
微機電系統（Micro-electro-mechanical system）發展至今，很多元件都已臻於成熟並大量應用在我們日常生活所使用的電子系統當中。近年來由於汽車安全保護系統的大量應用以及手機多變的娛樂功能，造成加速計實用性與必要性也相對提高，而利用MEMS製程可以達到微小化、批量製造與系統整合等優點。本研究利用微機電製程實現單軸加速計，透過玻璃回融技術實現全差分式電性連接，並配合體形微加工方式製作出高深寬比之加速計質量塊與感測電極，提升元件靈敏度。整顆元件結合上述優點所測得靈敏度為7.38mV/G，解析度為0.43mG/rtHz，非感測軸向其解耦合分別為Y軸12％Z軸14％。

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