微機電系統（Micro-Electro-Mechanical System, 簡稱MEMS）是目前具有發展潛力的研究領域之一，在現今的研究中，大致上可分為三大類，也就是微感測器、微致動器和微機械結構。其中微致動器主要是整個系統的動力來源。
本論文設計與製作一個能進行二維（水平和垂直）運動的微致動器，其中水平方向利用熱驅動來達成，而垂直方向則利用兩平板間的靜電力原理來驅動，而希望能獨立控制每個方向的運動。本論文是利用國家高速電腦中心所提供之微機電模擬軟體MEMCAD來進行模擬，以瞭解此微致動器水平熱驅動、垂直靜電驅動，在不同條件下的位移狀況，作為設計及製作時的參考，並是以表面微細加工(surface micro machining)的方式製作，最後將實際製作完成的元件進行量測，並將結果和模擬的結果來作比較，看是否達到所預期的結果。

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