本論文分別以醋酸系統和硝酸系統用溶膠－凝膠法鍍製之BFO為研究對象，探討在不同光源照光輔助並且用不同熱製程條件，對不同組成與結構之BFO薄膜的結晶行為及電性的影響，討論可能的作用機制。
由紫外光－可見光光譜分析得知醋酸系統及硝酸系統中，鐵酸鉍溶液以及其各成份溶液的吸收界限皆隨溶液溫度上升，產生紅移現象，且紅移量與溫度呈現一指數對應關係。據此，可利用改變烘烤溫度來改變各成份的吸收界限，進而影響薄膜吸收光源產生分解反應。
醋酸系統BCFO薄膜以150℃烘烤10min並使用UVC輔助熱處理，鐵、鉍、銫三種溶液皆可同時吸收光源產生分解反應，二次相的峰值大為減弱並提升BCFO的結晶性，為(110)、(1ī0)優選方向。而以100℃烘烤10min時可以提升薄膜緻密性，並減少二次相的生成，得到較高的崩潰電場，和較高的2Pr值。
硝酸系統B*FO(N)薄膜，由紫外光－可見光光譜分析中發現，100℃時UVC波長小於其各成份溶液的吸收界限，以傅立葉轉換紅外線光譜分析，UVC照光輔助可有效去除殘留的C=N=O和C=O官能基。B*FO(N)-D-UVC薄膜SEM表面影像中發現孔洞明顯的消失，X光繞射分析中發現結晶性提升，為(110)、(1ī0)優選方向，鐵電特性量測中電滯曲線較為飽和。
依據分析結果與參考相關文獻資料，推測BFO薄膜特性受紫外光影響之主要原因為溶膠－凝膠鍍膜製程中受紫外光光照效應可促進有機物的分解與揮發，影響薄膜之結晶性及表面形貌，並進一步影響其電性表現。

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