本研究為真空中施壓於純鈦與純鎳薄片再進行熱處理，以不同熱處理條件研究純鈦與純鎳反應過程與形成TiNi記憶合金之可行性。
第一部份以製程溫度T=1348K、1355K、1361K、1373K、1393K進行持溫5分鐘真空熱處理，以OM及SEM觀察各試片於不同溫度熱處理後鈦與鎳擴散情形以及試片顯微結構變化與成分分析，發現除了最高溫T=1393K處理試片其他試片均為層狀顯微結構，各層的成份分別為純Ni、TiNi3、TiNi、富Ti區，且以製程溫度T=1373K之試片所形成的TiNi相區體積比率為最高。
第二部份以TiNi相區比率最多的[T=1373K/5min]試片為基礎，改變持溫時間分別為20分鐘及2分鐘，觀察持溫時間增加或縮短對顯微結構變化與成分的影響，其中[T=1373K/20min]試片層狀結構之界面出現裂縫，而[T=1373K/2min]試片所形成TiNi相區體積比率則稍低於[T=1373K/5min]試片中體積比。
形狀記憶效應(SME)方面，量測各種試片在重複改變溫度時之曲度形狀變化，由曲度變化求取形狀記憶效果，試片[T=1373K/2min]和試片[T=1373K/5min]的形狀記憶效果較佳，對應到此製程條件下鈦與鎳箔片擴散形成等原子比TiNi相區之體積比率為較高。

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