本研究開發一壓電式加速度感測系統，並將其應用於機械振動的監控。隨著工業4.0的發展，對於機台設備的預防性維護需求明顯增加。為提升加速度計的靈敏度，本研究於不同的頻率下，比較不同形變模態之壓電式加速度計的設計，並於加速度計中嵌入平衡環以提升靈敏度，同時降低加速度計的交叉感應度。本研究採用PZT-5A作為壓電式感測材料，並運用Global MEMS 5µm的製程平台實現相關的設計。
本研究透過不同軟體(如COMSOL、Matlab、LTSpice)，開發出一種模態分析的方法，可用於整合客製化的加速度計及電荷放大器。本研究成功將自行開發之壓電式微機電加速度計，與市售之電荷放大器、微控制器STM32F373CCT6整合至PCB上，完成一壓電式微機電加速度計感測系統，可進行即時監控。此外，本研究所提出的嵌入式平衡環設計，使新型的加速度計靈敏度，較傳統式的加速度計提高3倍。於研究過程中所開發的固件程式及使用者介面功能，亦以實際的振動儀器成功的驗證。

This work demonstrates a system level approach of developing a PZT accelerometer system for machine vibration monitoring. As Industry 4.0 is booming, the demand for predictive maintenance of the machine has significantly increased. Various types of bending type piezoelectric accelerometer designs were studied at different frequencies to increase the sensitivity of the accelerometer. An approach of using guard rings embedded to accelerometers to increase sensitivity and reduce cross-sensitive acceleration has been proposed in this work. PZT-5A material is used as the PZT Sensing material. The designs will be fabricated on GlobalMEMS 5um platform.
An effective approach called Process modal analysis was developed by integrating different software’s (i.e COMSOL, Matlab and LTSpice) to study the non-standard accelerometer designs integrated with charge amplifiers. PZT MEMS accelerometer system with Commercially off Chip components has been successfully implemented at Printed Circuit Board (PCB) level. An effective system level approach to integrate PZT MEMS accelerometer and charge amplifiers with microcontroller STM32F373CCT6 for real time system monitoring was demonstrated. A Novel accelerometer design with Gimbal rings to enhance sensitivity was presented and has 3 times increase in the sensitivity over its Conventional design. Software algorithms were developed and signal processing techniques were used to realize the real time monitoring of machines. Firmware code and user interface applications were developed in this work and were successfully verified using shaker system.

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