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研究生: 廖建誠
Liao, Chien-Cheng
論文名稱: 單晶矽埋入式電極太陽能電池之製作
Fabrication of Single Crystalline Silicon Solar Cells with Buried-Contact Structure
指導教授: 王立康
Wang, Li-Karn
口試委員: 何文章
Ho, Wen-Jeng
張正陽
Chang, Jeng-Yang
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 光電工程研究所
Institute of Photonics Technologies
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 44
中文關鍵詞: 埋入式
外文關鍵詞: Buried-Contact
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  • 近年來因能源需求與日俱增,全世界都在找尋可用之新替代能源,加上全球各國對綠色能源大力的提倡,使得太陽能電池被大量研究與開發,使現今提升太陽能電池效率之結構與方法也越來越多,為了降低製造成本,本實驗多採用印刷方式來減低製作太陽能電池,以達成可大量製作與成本的降低。
    本實驗主要分成兩大部分,第一部分利用印刷方式先定義出電極區域,再利用酸蝕刻達成在電極區內重摻雜、非電極區內輕摻雜,再利用印刷的方式在正面印刷銀漿,而於矽晶片背面印刷鋁漿,製作出低成本之選擇性太陽能電池,此結構可以有效的提升短波長之光子吸收,以提升太陽能電池之效率。第二部分在於定義出的電極區域內,使用45% KOH在80℃下進行蝕刻,蝕刻出30um深的溝槽,此結構可以提升太陽能電池在長波段之載子收集率,以提升電流與填充因子,製作出埋入式電極太陽能電池(buried contact solar cell ,BSCS) 。


    目錄 第一章 序論 1 1.1前言 1 1.2太陽能電池的發展 1 1.3研究目的 4 1.4 論文概要 4 第二章 基本原理 5 2.1半導體物理基礎 5 2.1-1半導體晶體特性與結構 5 2.1-2載子的產生與復合 6 2.1-3光吸收 9 2.1-4死層效應 11 2.2太陽能電池原件之原理 12 2.2-1 P-N接面二極體 12 2.2-2太陽光譜與頻率響應 14 2.2-3太陽能電池之運作 12 2.3單晶矽之蝕刻特性 17 2.3-1等向性蝕刻 17 2.3-2非等向性蝕刻 18 2.4太陽能電池參數介紹 20 第三章 研究方法與製程步驟 22 3.1選擇性射極結構 22 3.2製程步驟 23 第四章 數據分析與討論 28 4.1選擇性射極結構之討論 28 4.1-1被表面擋層之討論 29 4.1-2磷擴散條件與蝕刻阻值分析 29 4.1-3數據比較 32 4.2埋入式選擇性射極結構討論 34 4.2-1電性分析 36 第五章 結論 37 參考文獻 39

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