本研究提出一新穎的磁致伸縮型電感感測微傳感器，具有受力結構與平面電感；其中，平面電感由磁致伸縮膜及平面線圈所構成，可同時耦合逆磁致伸縮效應與電感感測機制。當施加外界力量時，由於逆磁致伸縮效應，磁致伸縮膜本身會產生相應的導磁率變化，進而影響平面電感的電感值，透過電感值量測，便可得知電感值與力量變化之間的關係曲線。為了驗證磁致伸縮型電感感測微傳感器的可行性，本研究首先利用SOI製程平台製作包含了平面感測電感及矽質受壓薄膜的壓力傳感器以進行壓力靈敏度測試。從靈敏度的量測曲線顯示，此新型壓力傳感器的量規因子可達850左右；此外，藉由磁致伸縮膜的細長比設計，還可進一步有效調變壓力傳感器的性能。在定性量測方面，從磁化曲線發現，磁致伸縮膜的異向性場的確會隨著應力而改變，再度證實了逆磁致伸縮效應的發生。
磁致伸縮型電感感測微傳感器可視應用需求而做出相應調整，具有設計上的彈性。本研究先後採用CMOS-MEMS與MEPA製程平台，分別設計製作無線壓力感測陣列晶片以及撓性觸覺傳感器。基於CMOS-MEMS標準製程平台，壓力感測陣列晶片除了囊括多重感測範圍之外，憑藉著與讀取線圈間的互感耦合，也兼具無線傳輸能力。再者，透過三維鎳結構與三維PDMS結構之間的異質整合，磁致伸縮型電感感測觸覺傳感器在MEPA製程平台上不僅獲得初步成果，更具備了撓性應用的可能性。

This study presents a magnetostrictive type inductive sensing transducer which consisted of a planar coil, magnetic films, and a force supporting structure. As the force supporting structure deformed by an external load, the inverse magnetostriction effect would cause permeability changes of the magnetic films. Thus, the permeability changes as well as the external load can be detected by the inductance change of a planar inductor. To demonstrate the feasibility of the proposed transducer, pressure sensor designs which include the pressure supporting diaphragm, the planar coil and the patterns of magnetic films are fabricated and tested. Preliminary measurements show that the pressure sensor with 6 coil turns has sensitivities of 0.079%/kPa. In addition, based on the pattern design of the magnetic films, the gauge factor could be tuned from 55 to 852.
Moreover, the wireless sensing capability of the magnetostrictive type inductive sensing CMOS-MEMS pressure transducers are also demonstrated using the post CMOS process. Metal and dielectric layers of CMOS process are employed to form the planar coil and the pressure supporting diaphragm, respectively. An additional magnetostrictive film was patterned by the post CMOS process. This study further proposes a new process scheme to fabricate a polymer structure with embedded metal on the silicon substrate. Based on the proposed scheme, a magnetostrictive type flexible tactile transducer consisting of a polymer structure with embedded Ni coil winding is successfully exploited.

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