本研究呈現游標尺式懸浮閘極場效電晶體之位移感測方式並且應用於加速度計上，以此進行設計、數值軟體模擬及實際製作完成。
本研究的架構為藉由加速度計上的質量塊移動，使得附屬於加速度計上的多個閘極移動，再觀察是否閘極有覆蓋在汲極與源極之間的通道上方，決定該對MOS的通道部份是否導通。以通道部份是否有電流通過作為ON或OFF的判斷，利用多組閘極以此方式運作，可產生游標尺的機制，可得到較精確的測量值，並達成加速度計的輸出訊號在不需加上電路即可解讀為數位訊號，不同以往加速度計之輸出方式為類比訊號。
本研究的特色為提供加速度計一種不需電路即可達成訊號數位化的方式，並可根據游標尺式閘極大小的設計改變其解析度，並且使用可和CMOS製程相容的製程方式製作。

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