大氣電漿束克服了在大氣中激發電漿所面臨的高溫、低均勻度及容易造成電弧等問題，因此在材料的應用上比一般大氣電漿源具有其一定優勢。本研究的主要重點在瞭解大氣電漿束的基本特性，包括對電漿密度及活化粒子的分析等。實驗通以氦氣、氬氣及少量的氧氣為研究主軸。實驗結果發現，APPJ激發的電漿密度高達 ，且電漿中的活化種類以原子自由基(radical)為主。另外，在材料的應用方面，利用電漿的活化種類特性，選擇將光阻塗佈於矽晶片上進行研究，發現電漿的灰化率可高達2.26 m/min。

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