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研究生: 陳奕中
Chen, I-Chung
論文名稱: 大面積有機半導體氣體感測器製程開發
Large Area Process Development of Organic Semiconductor Gas Sensor
指導教授: 洪勝富
Horng, Sheng-Fu
口試委員: 冉曉雯
孟心飛
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電子工程研究所
Institute of Electronics Engineering
論文出版年: 2019
畢業學年度: 107
語文別: 中文
論文頁數: 66
中文關鍵詞: 氣體感測大面積有機半導體
外文關鍵詞: Large Area, Organic Semiconductor, Gas Sensor
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  • 本論文主要為開發一利於商業化量產之新製程,用來製作高靈敏之有機半導體氨氣感測器,論文主要分為兩大部分。
    第一部分主要為本團隊技術核心介紹以及如何改善原有製程以符合未來商業化及標準化之目標。奠基於此製程上再進一步開發本論文之大面積陣列製程,以達到未來能夠快速量產的優勢。
    第二部分為利用本團隊最常使用之兩大有機半導體感測材料P3HT及PTB7,將兩者嘗試應用在大面積製程上,觀察大面積製程元件在氣體感測器之幾項重點性能:電性、氣體反應及壽命之表現,並比較兩材料之優劣。接著透過統計分析方式分析大面積之均勻性。提供本團隊在未來將此製程用於商業化量產之數據及經驗。


    This Thesis is mainly about developing a new process for mass production of highly sensitive commercial organic semiconductor ammonia sensor. The contents can be divided into two parts.
    The first part is mainly about demonstrating the core technology of our team and how to improve the present process to meet the goal of commercialization and standardization in future. Then, we based on this process to further develop the large area array process of this thesis for the advantage of mass production in future.
    The second part is about utilizing two mainly organic semiconductor sensing materials of our team, P3HT and PTB7 , on the large area process. Then, we observe some key charateristics of gas sensors, such as I-V characteristic, gas sensibility and life time. Further, we use statistical analysis to check the uniformity of the large area process devices. Finally, we compare the advantages and disavantages of the devices made of P3HT and PTB7.

    摘要----------I Abstract----------II 目錄----------V 圖目錄----------VII 表目錄----------X Chapter1 緒論----------1 1-1研究背景----------1 1-2研究動機----------3 1-3論文架構----------5 Chapter2 有機材料簡介與元件操作原理----------6 2-1有機材料----------6 2-1-1有機材料----------6 2-1-2 PEDOT:PSS----------7 2-2有機半導體感測二極體----------9 2-3有機材料氣體感測原理----------10 Chapter3 標準有機半導體氣體感測元件製程----------13 3-1基本之圖樣定義製程----------13 3-2垂直式奈米孔洞結構感測器之製程----------16 3-3 10微米柵狀結構感測器製程----------22 3.3.1黃光微影製程----------22 3.3.2 Lift-off製程----------25 3-4先期量測系統介紹----------29 Chapter4 大面積5×5陣列製程介紹----------31 4-1基板之圖樣及製程差異----------31 4-2玻璃腔體量測系統----------35 Chapter5 大面積陣列製程P3HT感測器----------37 5-1基本電性----------37 5-2氣體反應----------39 5-3均勻性----------41 5-4 壽命----------44 Chapter6 大面積陣列製程PTB7感測器----------46 6-1基本電性----------46 6-2氣體反應----------53 6-3均勻性----------55 6-4壽命----------58 Chapter7研究總結與未來展望----------60 7-1研究總結----------60 7-2未來展望----------62 參考文獻----------63 附錄----------66 P3HT大面積元件均勻性量測結果----------66

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