在半導體系統中，各生產設備必須經常性地進行機台維護保養之工作，且設備成本往往佔製造成本極大的比例。本研究建立一套以設備預防維護人力需求為考量的人力標準模型，提出一以最小化人力僱用以及最小化人力資源使用量為目標的最佳化混合整數規劃模式，並以遺傳演算法求算最佳的維護資源人數與維護作業起始時間點，並以田口實驗設計方法（Taguchi Method）決定最佳的因子水準組合。將其結果與一般傳統以裕度為基礎的資源撫平法相比較，結果顯示本研究所建立的預防維護人力標準不但可以提供最佳化人力僱用水準亦能改善各個產能損失指標，包括平均在製品數量、平均週期時間、總產量以及人力資源利用率等指標。
本研究的貢獻包括：
1. 提供一建立預防維護人力標準的方法論來求算最適的人力僱用水準與人力使用效率。
2. 提供最佳化的預防維護人力排程。

The study established an approach to determine the manpower standard for equipment preventive maintenance（PM） while optimizing the scheduling of PM based on manpower requirement. A mixed integer programming（MIP） model was proposed to optimize the manpower usage based on either minimum manpower employment or leveling of the manpower usage. Genetic algorithm（GA） was used to solve the MIP model. The results were compared with a slack-based traditional resource leveling approach. the result shows that the established PM manpower standard not only provided the optimal manpower usage level but also improve the production performance in cycle time, stage move, and WIP level.
Contributions of this research include:
1. Providing a way to establish ideal manpower standard for calculation of proper employment level and manpower usage efficiency for equipment preventive maintenance
2. Providing an optimization for PM manpower scheduling.

中文文獻
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