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研究生： 蔡俊毅
Jinni Tsay
論文名稱： 撓性雙穩態微機構的設計與實驗
Compliant Bistable Micromechanism: Design and Experiments
指導教授： 宋震國 博士
Dr. Cheng-Kuo Sung
口試委員:
學位類別： 博士
Doctor
系所名稱： 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年： 2004
畢業學年度： 92
語文別： 英文
論文頁數： 115
中文關鍵詞： 撓性機構 、雙穩態機構 、微機電系統 、微鏡面定位裝置 、動態特性
外文關鍵詞： Compliant Mechanism, Bistable Mechanism, MEMS, Micromirror Positioner, Dynamic Characteristics
相關次數： 點閱：3  下載：0 
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    • 撓性機構具有提高製造性、消除剛性接頭的間隙及摩擦、減少組裝程序、降低成本等特性，特別適合微機電系統(MEMS)，尤其微機電系統目前的製程仍受限，無法製造出配合良好的剛性接頭，撓性機構的應用更可提高製程良率，正廣泛應用於微機電系統。雙穩態機構則特別適合用在切換裝置，因為雙穩態機構可以在不供應能量下，保持在穩態位置，因此具有省能效果，而且穩態位置相對具有較高之定位精度。撓性雙穩態微機構結合了撓性機構與雙穩態機構的優點，在微機電系統中可以展現其優越特性。本論文有系統的設計撓性雙穩態微機構，從雙穩態行為的確認、兩個穩態位置間位移量的計算、致動力的評估以及結構最大應力的計算，以得到所需的雙穩態行為，其位移量符合所望，致動力低於致動器所提供之作用力，並保持在材料安全範圍內。除了解析方法的求解，同時使用有限元素法(FEM)模擬其結果，最後以實驗驗證設計之可行性。除此，撓性雙穩態微機構的動態特性具有十分特異的特性，屬於非線性系統，又與一般的非線性系統不同，因此具有與眾不同的性質，本研究針對撓性雙穩態微機構的動態特性加以研究，並提出研究成果。另外，本論文也提出幾個撓性雙穩態微機構的應用例，並加以實現並證實能達到預期之功能。

    This study presents a systematic design methodology to accomplish a compliant bistable micromechanism. The decision of the bistable behavior, the stresses of elastic members, the actuating force, the dynamic characteristics, and the springs are all analyzed, and a set of assumptions is arrived at that simplifies the calculations to design the micromechanism. Simulations are then carried out to verify the calculations and to identify the influence of the errors due to simplification. In addition, the particular dynamic characteristics of bistable mechanisms are derived, simulated, and subjected to experimentation. The experiments demonstrate the feasibility of the designs, the calculations and the simulations. The effects of tuning the parameters of the micromechanism are also illustrated clearly. Through tuning the parameters, one can create a compliant bistable mechanism which can perform the desired functions. A compliant bistable micromechanism is applicable to the switching device of MEMS. The applications of microrelay and micromirror positioner are specifically addressed. The devices for the relative experiments are fabricated by MUMPs® provided by MEMSCAP; the experiments are carried out and the results discussed.

    Abstract ii Content iii Index of Tables v Index of Figures vi Chapter 1 Introduction 1 1.1 Background 1 1.2 Literature Review 2 1.2-1 Compliant Mechanisms 3 1.2-2 Bistable Mechanisms 5 1.2-3 Microrelays 10 1.2-4 Dynamic Characteristics of MEMS 11 1.3 The Content of This Research 12 Chapter 2 Theoretical Analyses 14 2.1 Strain Energy 14 2.2 Actuating Force 19 2.3 Decision of Bistable Behavior 23 2.4 Stresses and Safety 27 2.5 Added Stopper 29 2.6 Analyses of Spring 30 2.6-1 Stiffness of Serpentine Spring 30 2.6-2 Improvement of Unalignment 35 2.7 Dynamic Characteristics 37 2.7-1 Nonlinear Systems 37 2.7-2 Dynamic Analysis of Unistable Mechanism 40 2.7-3 Dynamic Analysis of Bistable Mechanism 45 2.8 Examples 50 2.8-1 Example for Verifying Bistable Behavior 50 2.8-2 Example for Verifying Stiffness of Springs 52 2.8-3 Example for Verifying Vibration of Unistable Mechanism 53 2.8-4 Example for Verifying Vibration of Bistable Mechanism 54 Chapter 3 Finite Element Simulations and Their Comparison with Theoretical Analyses 56 3.1 Simulations to Influence of Assumptions 56 3.1-1 Imperfect Boundary Condition – Fixed Ends of Beams 56 3.1-2 Moment Introduced by Elastic Hinge Bent at Center of Side Beam 58 3.1-3 Imperfect Boundary of Elastic Hinge 58 3.1-4 Imperfect Boundary Conditions to Slender Beams of Springs 60 3.2 Simulations of Springs 62 3.2-1 Fixed End of Slender Beam 62 3.2-2 Simulations of Serpentine Springs 64 3.2-3 Simulations of the Box Springs 67 3.3 Dynamic Characteristics of Bistable Mechanisms 69 3.3-1 Modal Analysis of Unistable Mechanism 69 3.3-2 Modal analysis of Bistable Mechanism 70 Chapter 4 Applications 76 4.1 Microrelay 76 4.1-1 Dynamic Characteristics 76 4.1-2 Contact Force 77 4.2 Micromirror Positioner 79 Chapter 5 Experiments and Discussions 82 5.1 Experimental Instruments 82 5.1-1 Vibration Isolation Platform 82 5.1-2 Workbench 83 5.1-3 Optical Micrography System 83 5.1-4 Scanning Electron Microscope 83 5.1-5 Electrical Instruments 85 5.2 Fabrication 85 5.2-1 Surface Micromachining Processes 85 5.2-2 Magnifying Thickness 89 5.3 Experimental Results and Discussion: Bistable Mechanisms 89 5.3-1 Switching Bistable Mechanisms 89 5.3-2 Experimental Results 93 5.3-3 Discussion: Bistable Behavior 99 5.3-4 Bistable Mechanism Added Stopper 100 5.3-5 Discussion: Bistable Mechanism Added Stopper 100 5.4 Experimental Results and Discussion: Micromirror Positioner 101 5.4-1 Experiment and Results 101 5.4-2 Discussion: Micromirror Positioner 102 5.5 Experimental Results: Serpentine Spring 103 5.5-1 Lateral Deformation of Serpentine Spring 103 5.6 Experimental Results and Discussion: Dynamic Characteristics 104 5.6-1 Dynamic Response of Unistable Mechanism 105 5.6-2 Dynamic Response of Bistable Mechanism 106 5.6-3 Discussion: Dynamic Response of Nonlinear System 107 5.7 Sections of Beams Decreased by Etching 107 Chapter 6 Conclusions and Future Works 109 6.1 Conclusions 109 6.2 Future Works 110 6.2-1 Dynamic Characteristics of Bistable Mechanism 110

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