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研究生: 陳書展
Chen, Shu Jhan
論文名稱: 微加速度感測器受振動負載之有限單元應力分析
Vibration Analysis of Micro Accelerometer Using Finite Element Method
指導教授: 葉孟考
Yeh, Meng Kao
口試委員: 張禎元
Chang, Jen Yuan
林明泉
Lin, Ming Chuan
學位類別: 碩士
Master
系所名稱: 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年: 2016
畢業學年度: 104
語文別: 中文
論文頁數: 66
中文關鍵詞: 微加速度感測器應力分析有限單元分析振動分析
外文關鍵詞: Micro-Accelerometer, Stress analysis, Finite Element Analysis, Vibration Analysis
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  • 科技日新月異的發展,不僅對我們的生活產生重大的改變,也為工業界帶來巨大的變革,因消費者對商品的需求,促使電子產品朝向複合功能且微型化的方向演進,以電子計算機為例,由早期處理速度為數毫秒的超大型電腦進展為現代以奈秒為計算單位的手持式平板電腦。但在如此有限的空間中塞入眾多的電子元件,造成彼此相互影響的機率提高,因此可靠性評估便成了相當重要的問題。本文以微加速度感測器(Micro Accelerometer)與FR-4印刷電路板(Print Circuit Board)結合的組件為研究對象,使用有限單元法進行應力分析。加速度計主要的功能是量測加速度,依據MIL-STD-883H制定的加速度測試實驗,對組件進行受慣性力的靜力分析,發現微加速度感測器受加速度影響,質量塊會產生較大的慣性力,使得彈簧結構有應力集中的現象;且因其特殊的八層結構導致彎曲變形成較複雜的形狀,因此彈簧結構成為較容易發生破壞的部分。另為避免運作時可能發生共振破壞,本研究對微加速度感測器進行模態分析,以獲得的模態資訊為之後的動態響應分析作參考;依據JEDEC規範的振動試驗條件,作振動響應分析,判斷組件遇振動負載時可能發生的失效現象,並改變阻尼參數探討對響應值的影響,本文研究的結果可提供微感測器研發者作為相關設計的參考。


    The rapid development of science and technology not only changes our life but also brings a huge transformation for the industry. Demand for commodities urges electronic products toward multi-function and miniaturization. For example, in the early days computers had a large size and lower computational efficiency; and we can easily use a tablet in one hand recently. To avoid failure caused by populated electronic elements located in a small space, it has become an important issue to assess the reliability of these miniaturized electronic products. In this study, the stress and modal analyses of a micro-accelerometer, mounted on a FR-4 printed circuit board, were investigated using the finite element method. The micro-accelerometer assembly was simulated according to the level A, B and C of MIL-STD-883H standard and maximum stresses were obtained for the device under an inertia force. The results show that the spring of eight layers, connecting to the proof mass in the device, had a stress concentration at its corners, which became a potential failure location of the micro-accelerometer. The modal analysis for the micro-accelerometer under harmonic loading was also performed to understand the dynamic behavior of the micro sensor. The micro sensor was simulated according to JEDEC standard of vibration test, and it could determine whether the micro sensor failed or not. Various levels of damping were added in the analysis to investigate their effects on the dynamic response of micro sensor. These results could be provided as a design reference for the developer

    摘要....................................................I 誌謝..................................................III 目錄...................................................IV 圖表目錄................................................VI 第一章 緒論..............................................1 1.1微加速度感測器........................................2 1.2文獻回顧..............................................3 1.3研究主題..............................................6 第二章 有限單元分析.......................................8 2.1 微加速度感測器之有限單元分析...........................9 2.2 振動分析理論........................................10 2.2.1 模態分析..........................................10 2.2.2 簡諧響應分析......................................12 2.2.3 簡諧響應分析解法...................................13 2.3 子模型法............................................14 2.4 有限單元之模型建立與振動分析..........................15 2.4.1 微加速度感測器之網格模型建立........................15 2.4.2 加速度分析之邊界條件與負載設定......................17 2.4.3 模態分析之邊界條件設定.............................18 2.4.4 簡諧響應分析之邊界條件與負載設定....................18 第三章 振動量測與可靠度分析..............................20 3.1 JEDEC.............................................20 3.2 試驗設備...........................................20 3.2.1 激振器...........................................21 3.2.2 訊號產生器與功率放大器.............................21 3.2.3 都卜勒測振儀......................................21 3.3 振動量測流程........................................21 3.4可靠度分析...........................................23 第四章 結果與討論........................................24 4.1 微加速度感測器應力分析...............................24 4.1.1 收斂性分析結果....................................24 4.1.2 微加速度感測晶片子模型分析結果......................25 4.1.3 接觸分析結果......................................27 4.2 微加速度感測器模態分析與振動試驗結果...................27 4.3 微加速度感測器之簡諧響應分析結果......................28 4.3.1收斂性分析結果.....................................29 4.3.2 不同負載對簡諧響應分析之影響........................29 4.3.3 阻尼對響應分析結果之影響............................31 第五章 結論與未來展望....................................32 5.1 結論...............................................32 5.2 未來展望............................................33 參考文獻................................................34 圖表...................................................38

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