研究生: |
林于智 Yu-Chih Lin |
---|---|
論文名稱: |
精密條紋式塗佈工程之研究 An Experimental Study on Precision Stripe Coating |
指導教授: |
劉大佼
Ta-Jo Liu |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 化學工程學系 Department of Chemical Engineering |
論文出版年: | 2008 |
畢業學年度: | 96 |
語文別: | 中文 |
論文頁數: | 172 |
中文關鍵詞: | 彩色濾光片 、條紋塗佈 、光阻劑 、氫鍵效應 |
外文關鍵詞: | color filter, stripe coating, photoresist, hydrogen bonding |
相關次數: | 點閱:2 下載:0 |
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本研究的目標為發展一種特殊塗細條及薄層的塗佈技術,取代傳統寬幅式塗佈彩色濾光片製程,如能成功,可減少塗液之使用和減少塗液之成本,省下曝光、蝕刻等手續。
影響條紋式塗佈工程的因素非常多,物理參數如黏度、表面張力、接觸角,幾何參數如狹縫間隙、塗佈間隙等,除此之外,由於本實驗操作尺度更為精細,所以實驗過程中發現了更多微小的細節會影響到條紋式塗佈工程的成功與否,其原因主要在於實驗本身操作機制的精密度與塗液本身性質的配合有關。此外,本研究利用CCD建立流場觀測技術以及拍照分析膜面的平整性與寬度,藉此觀察這些不同參數對於塗膜的影響程度。
本研究需要克服膜寬上尺度的限制,必須使用更為精密的流量控制器來提供所需要的微小流量,所以本實驗採用了一套精密空氣控制系統作為塗出150μm膜寬的供料系統,同時採用精密點膠塗佈設備做為塗佈工具,此系統可完全克服塗佈流體潤濕膜唇以及塗液回流等問題,如此一來,配合實驗參數即可塗出150μm的條紋寬度,但礙於實驗機台與儀器配合上的限制,未能找到屬於150μm條紋塗佈的塗佈視窗,只能設定一個操作區間能有150μm條紋膜寬出現,此外,藉由工研院膜厚測量儀的幫助下,發現了一項特殊的物理現象,本實驗定義此現象稱為雙牛角現象(double horn effect),在透過多次實驗上的測試輔助和塗液改良後,已經掌握控制雙牛角現象形成的機制和塗液配方,並經由FTIR和流變儀的分析結果,了解到高分子鏈氫鍵效應的發生是雙牛角現象形成的主要關鍵,只要掌握控制塗液氫鍵能力的強弱以及有適當溶劑的搭配,就可以控制雙牛角現象。
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